Patents by Inventor Irina I. Pozhinskaya

Irina I. Pozhinskaya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Catadioptric optical system for scatterometry
    Patent number: 8107173
    Abstract: A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric system includes a correcting plate and an optical system. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The optical system reflects a first portion of the conditioned electromagnetic radiation, refracts a second portion of the conditioned electromagnetic radiation, and focuses the reflected first portion of the conditioned electromagnetic radiation onto a target portion of a substrate. The first portion of the electromagnetic radiation is not refracted by an optical element, allowing the catadioptric optical system to operate in a broad spectral range.
    Type: Grant
    Filed: October 29, 2009
    Date of Patent: January 31, 2012
    Assignee: ASML Holding N.V.
    Inventors: Yevgeniy Konstanitinovich Shmarev, Stanislav Y. Smirnov, Irina I. Pozhinskaya
  • Catadioptric Optical System for Scatterometry
    Publication number: 20100046092
    Abstract: A catadioptric system is provided comprising a correcting plate and an optical system. The correcting plate is configured to condition electromagnetic radiation to correct at least one aberration. The optical system is configured to reflect a first portion of the conditioned electromagnetic radiation, to refract a second portion of the conditioned electromagnetic radiation, and to focus the reflected first portion of the conditioned electromagnetic radiation onto a target portion of a substrate. The first portion of the electromagnetic radiation is not refracted by an optical element, allowing the catadioptric optical system to operate in a broad spectral range.
    Type: Application
    Filed: October 29, 2009
    Publication date: February 25, 2010
    Applicant: ASML Holding N.V.
    Inventors: Yevgeniy Konstantinovich Shmarev, Stanislav Y. Smirnov, Irina I. Pozhinskaya
  • Catadioptric optical system for scatterometry
    Patent number: 7633689
    Abstract: A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric optical system includes a correcting plate, a first reflective surface and a second reflective surface. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The first reflective surface is positioned to reflect the electromagnetic radiation conditioned by the correcting plate. The second reflective surface is positioned to focus the electromagnetic radiation reflected by the first reflective surface onto a target portion of a substrate. The electromagnetic radiation reflected by the first reflective surface and focused by the second reflective surface is not refracted by a refractive element, thereby enabling the catadioptric optical system to operate in a broad spectral range.
    Type: Grant
    Filed: July 18, 2007
    Date of Patent: December 15, 2009
    Assignee: ASML Holding N.V.
    Inventors: Yevgeniy Konstantinovich Shmarev, Stanislav Y. Smirnov, Irina I. Pozhinskaya
  • Catadioptric Optical System for Scatterometry
    Publication number: 20090021845
    Abstract: A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric optical system includes a correcting plate, a first reflective surface and a second reflective surface. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The first reflective surface is positioned to reflect the electromagnetic radiation conditioned by the correcting plate. The second reflective surface is positioned to focus the electromagnetic radiation reflected by the first reflective surface onto a target portion of a substrate. The electromagnetic radiation reflected by the first reflective surface and focused by the second reflective surface is not refracted by a refractive element, thereby enabling the catadioptric optical system to operate in a broad spectral range.
    Type: Application
    Filed: July 18, 2007
    Publication date: January 22, 2009
    Applicant: ASML Holding N.V.
    Inventors: Yevgeniy Konstantinovich Shmarev, Stanislav Y. Smirnov, Irina I. Pozhinskaya