Abstract: A control method includes: monitoring a statistic obtained by performing a multivariate analysis on a plurality of parameters; extracting, from the plurality of parameters, a predetermined number of higher-order parameters in terms of an influence degree on fluctuation of the statistic; generating a plurality of experimental patterns according to an experimental design method; acquiring a measurement result of a specific parameter indicating quality of a product when at least one device is controlled according to each of the plurality of experimental patterns; setting a new target value of the predetermined number of higher-order parameters in order to stabilize a value of the specific parameter within a management range based on the measurement result; and controlling the at least one device such that the predetermined number of higher-order parameters approaches the new target value.

Abstract: An information processing device includes a camera interface and a processor, the camera interface acquiring a moving image from a first camera that is installed at a production site and that images a worker and surroundings of the worker and from a second camera that is installed at the production site and that images a face of the worker. The processor detects an operation section of work performed by the worker from a predetermined number of consecutive frames included in the moving image acquired from the first camera using an inference model. The processor detects the emotion and the line-of-sight direction of the worker included in each frame of the moving image acquired from the second camera. Further, the processor provides a detection result.

Abstract: An active matrix device includes: a substrate; a pixel electrode formed at a side adjacent to one of surfaces of the substrate; a switching element, including: a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode; a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode; a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate; a first wiring line coupled with the movable electrode; and a second wiring line coupled with the driving electrode.

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode mainly made of silicon and displaceably provided so as to contact with and separate from the fixed electrode, and a driving electrode provided to oppose the movable electrode via an electrostatic gap; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, wherein a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically connect the first wiring to the pixel electrode.

Abstract: An electro-optical display device comprises: an active matrix unit including a substrate having one surface and the other surface and a plurality of switching elements provided on the one surface of the substrate; a shutter unit provided on the active matrix unit, and a first microlens array provided on the other surface of the substrate of the active matrix unit, the first microlens array having a plurality of microlenses formed on the other surface of the substrate in a corresponding relationship with the plurality of window portions.

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode displaceably provided to contact with and separate from the fixed electrode, a driving electrode provided to oppose the movable electrode via an electrostatic gap, and an adhesion-preventing mechanism that prevents adhesion between the movable electrode and the driving electrode; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, in which a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode mainly made of silicon and displaceably provided so as to contact with and separate from the fixed electrode, and a driving electrode provided to oppose the movable electrode via an electrostatic gap; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, wherein a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically connect the first wiring to the pixel electrode.

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode mainly made of silicon and displaceably provided so as to contact with and separate from the fixed electrode, and a driving electrode provided to oppose the movable electrode via an electrostatic gap; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, wherein a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically connect the first wiring to the pixel electrode.

Abstract: An electro-optical display device comprises: an active matrix unit including a substrate having one surface and the other surface and a plurality of switching elements provided on the one surface of the substrate; a shutter unit provided on the active matrix unit, and a first microlens array provided on the other surface of the substrate of the active matrix unit, the first microlens array having a plurality of microlenses formed on the other surface of the substrate in a corresponding relationship with the plurality of window portions.

Abstract: An active matrix device includes: a substrate; a pixel electrode formed at a side adjacent to one of surfaces of the substrate; a switching element, including: a fixed electrode formed so as to correspond to the pixel electrode and coupled with the pixel electrode; a movable electrode formed so as to be displaced toward the fixed electrode along a surface direction of the substrate to be in one of states being in contact with the fixed electrode and apart from the fixed electrode; a driving electrode formed so as to form an electrostatic gap between the movable electrode and the driving electrode, the fixed electrode, the movable electrode, and the driving electrode being disposed in different positions from each other along the surface direction of the substrate; a first wiring line coupled with the movable electrode; and a second wiring line coupled with the driving electrode.

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode displaceably provided to contact with and separate from the fixed electrode, a driving electrode provided to oppose the movable electrode via an electrostatic gap, and an adhesion-preventing mechanism that prevents adhesion between the movable electrode and the driving electrode; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, in which a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically

Abstract: An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode mainly made of silicon and displaceably provided so as to contact with and separate from the fixed electrode, and a driving electrode provided to oppose the movable electrode via an electrostatic gap; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, wherein a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically connect the first wiring to the pixel electrode.

Abstract: An active matrix device includes: a plurality of pixel electrodes provided above a surface of the substrate; a plurality of switching elements provided so as to correspond to the pixel electrodes, each switching element including: a fixed electrode coupled to one of the pixel electrodes; a movable electrode provided so as to come into contact with or depart from the fixed electrode; and a drive electrode provided so as to be opposed to the movable electrode with an electrostatic gap therebetween; a plurality of first wiring lines coupled to the movable electrodes; and a plurality of second wiring lines coupled to the drive electrodes. Application of a voltage between the movable electrode and the drive electrode generates electrostatic attraction therebetween. The movable electrode is moved by the electrostatic attraction so that the movable electrode comes into contact with the fixed electrode so as to establish continuity between the first wiring line and the corresponding pixel electrode.

Abstract: An infrared absorption measurement method including: (a) measuring infrared absorption of a target component in a sample gas while decompressing the sample gas so that an absorption area in a peak region of the target component in the infrared absorption shown in a graph is within a predetermined range, the graph showing the relationship between the wave number and absorbance of the sample gas; and (b) calculating the concentration of the target component in the sample gas based on the absorption area and pressure of the decompressed sample gas.

Abstract: An infrared absorption measurement method includes: (a) measuring infrared absorption of a measurement target component in a state in which a sample gas including the measurement target component is decompressed; (b) calculating an absorption area in a peak region of the measurement target component in the infrared absorption shown in a graph which shows the relationship between the wave number and absorbance of the sample gas; and (c) calculating a concentration of the measurement target component in the sample gas based on the absorption area and pressure of the sample gas during decompression.

Abstract: To provide a plasma etching method that can suppress discharge of active gases that do not contribute to plasma etching into the atmosphere, a plasma etching apparatus 10 is composed of a vacuum chamber 12, a plasma processing section 14, a helium supply section 16, a PFC supply section 18, a switching device 20, and an exhaust opening 22. In the use of the apparatus 10, first, helium is introduced into the vacuum chamber 12 through the switching device 20. Then, while introducing the helium, helium is also discharged from the exhaust opening 22 to set the interior of the vacuum chamber 12 at a specified pressure. When the pressure within the vacuum chamber 12 is stabilized at the specified pressure, plasma is generated within the vacuum chamber 12, and at the same time, helium is switched to carbon tetrafluoride by the switching device 20. As a result, carbon tetrafluoride that does not contribute to the plasma etching is prevented from being discharged into the atmosphere.

Abstract: The present invention relates to a method and an apparatus for processing PFC, which does not damage a vacuum pump, and in which maintenance and inspection works are readily performed, and an incineration process is not required. The processing apparatus 10 is constructed with a vacuum chamber 12, and a vacuum pump 16, a reaction gas introduction section 17, a plasma process section 18 and a polymer collection section 20 that are successively disposed through a piping 14 in a succeeding stage of the vacuum chamber 12.

Abstract: A temperature adjustment apparatus that can reduce the amount of evaporation of a medium without using a closed type container. A temperature adjustment apparatus 24 is composed of a container 26 that contains PFC 42 for heat exchange, a circulation path 28 of the PFC 42 that passes through an electrode 20 of a plasma processing apparatus 10, and a pump 30. A liquid layer 40 that separates from the PFC 42 is formed in an upper layer of the PFC 42 that is contained in the container 26. As a result, the PFC 42 does not directly contact the atmosphere and therefore the amount of evaporation of the PFC 42 into the atmosphere is substantially reduced.

Abstract: A gas processing device includes a sub pump that reduces the pressure of gases containing reactive components and exhausts them, a plasma decomposition device that decomposes the reactive components comprised within the gases exhausted from the sub pump then exhausts them, and a main pump that reduces the pressure of the gases exhausted from the plasma decomposition device then exhausts them.

Abstract: An infrared absorption measurement method includes: (a) measuring infrared absorption of a measurement target component in a state in which a sample gas including the measurement target component is decompressed; (b) calculating an absorption area in a peak region of the measurement target component in the infrared absorption shown in a graph which shows the relationship between the wave number and absorbance of the sample gas; and (c) calculating a concentration of the measurement target component in the sample gas based on the absorption area and pressure of the sample gas during decompression.