Abstract: A heater pattern is arranged on at least one substrate among substrates configuring a package, and a temperature in the package is controlled by controlling a quantity of electricity carried to the heater pattern corresponding to the ambient temperature of a sensor chip in the package.

Abstract: To provide a flowmeter producing stable measurement results and coincidentally achieving miniaturization, a bent portion is provided in a flow path located between an inlet port of fluids to the flowmeter and a second flow path at which a sensor detecting a flow rate is positioned, thus forming at a sensor an almost uniform flow-velocity distribution in cross-section of the fluids and a reproducible and constant flow-velocity distribution.

Abstract: A package is configured by stacking a flat board whereupon a rectangular hole for storing a sensor chip is formed, a flat board whereupon a hole section to be a package inner channel for introducing a measurement target gas into the sensor chip is formed, and a flat board whereupon hole sections which communicate with the package inner channel as an inlet and an outlet of the measurement target gas on the same end surface of the package are formed.

Abstract: A pressure switch includes an external force transmission mechanism for separating a cover from a housing. The cover and the external force transmission mechanism defines a first pressure chamber, and the housing and the external force transmission mechanism defines a second pressure chamber. In the second pressure chamber, a movable piece having first and second movable members arranged opposite to each other and one or more fixed contacts are disposed. The first and second movable members are connected to each other via a flat spring. A contact is disposed on the second movable member and functions as a movable contact. The external force transmission mechanism applies an external force to the first movable member to displace the first movable member, and the second movable member is reversed at the operating point of the first movable member, so that the movable contact is brought into contact with the fixed contact.

Abstract: A pressure switch includes an external force transmission mechanism for separating a cover from a housing. The cover and the external force transmission mechanism defines a first pressure chamber, and the housing and the external force transmission mechanism defines a second pressure chamber. In the second pressure chamber, a movable piece having first and second movable members arranged opposite to each other and one or more fixed contacts are disposed. The first and second movable members are connected to each other via a flat spring. A contact is disposed on the second movable member and functions as a movable contact. The external force transmission mechanism applies an external force to the first movable member to displace the first movable member, and the second movable member is reversed at the operating point of the first movable member, so that the movable contact is brought into contact with the fixed contact.

Abstract: A path detector is constructed so that a path block body, which forms a given path and which has a flow sensor interposed in the path, and a circuit board having an electric circuit mounted thereon are accommodated in a rectangular parallelepiped or cubic housing. An indicator and an operation switch are provided in a front surface portion of the housing that is exposed at a front surface of a given panel when the housing is fixed to the panel. The path in the path block body is U-shaped path and has an inlet and an outlet in a back surface portion of the housing. A terminal for external connection of the circuit board is also disposed in the back surface portion of the housing.

Abstract: To provide a flowmeter producing stable measurement results and coincidentally achieving miniaturization, a bent portion is provided in a flow path located between an inlet port of fluids to the flowmeter and a second flow path at which a sensor detecting a flow rate is positioned, thus forming at a sensor an almost uniform flow-velocity distribution in cross-section of the fluids and a reproducible and constant flow-velocity distribution.

Abstract: A waste-material entry prevention member arranged upstream of a flow sensor is a rod- or plate-like member protruding halfway across the cross-section of a flow passage. Hence, vortexes or energy of the vortexes produced in fluid flowing by the waste-material entry prevention member is diffused by a stream of the fluid passing through a space left between the waste-material entry prevention member and the wall surface of the flow passage which the waste-material entry prevention member faces. Thus, production of vortexes is held down. Further, by making the flow sensor generate heat or heating the flow sensor, thermophoresis of the fluid is caused near the surface of the flow sensor. By this, particles contained in the fluid are prevented from accumulating on the flow sensor.

Abstract: A path detector constructed so that a path block body (10) forming a given path (11) and having a flow sensor (13) interposed in the path (11) and a circuit board (4) surmounted by an electric circuit are accommodated in a rectangular parallelepiped or cubic housing (1). There are provided an indicator (6) and an operation switch (7) in the front surface portion of the housing (1) that is exposed to the front surface of a given panel when fixed to the panel. A U-shaped path is so formed as to have an inlet (2) and an outlet (3) in the back surface portion of the housing (1). A terminal for external connection (5) of the circuit board (4) is disposed in the back surface portion of the housing (1).

Abstract: A waste-material entry prevention member arranged upstream of a flow sensor is a rod- or plate-like member protruding halfway across the cross-section of a flow passage. Hence, vortexes or energy of the vortexes produced in fluid flowing by the waste-material entry prevention member is diffused by a stream of the fluid passing through a space left between the waste-material entry prevention member and the wall surface of the flow passage which the waste-material entry prevention member faces. Thus, production of vortexes is held down. Further, by making the flow sensor generate heat or heating the flow sensor, thermophoresis of the fluid is caused near the surface of the flow sensor. By this, particles contained in the fluid are prevented from accumulating on the flow sensor.