Abstract: An electric apparatus for controlling movement of a target object by performing first and second feedback controls, based on a detection signal obtained from detecting the movement of the target object, generates an operation quantity on the target object based on first and second operation quantities for the second feedback control if one of a predetermined target value and an estimated first state quantity of the target object is higher than a first threshold value, and generates the operation quantity on the target object using only the first operation quantity from among the first and the second operation quantities if one of the target value and the first state quantity of the target object is lower than the first threshold value.

Abstract: An apparatus detects movement of a target object, estimates a control quantity for first feedback control for the target object at a first period based on a detection signal, estimates a first state quantity of the target object and a second state quantity obtained by time differentiation of the first state quantity for second feedback control for the target object at a second period, shorter than the first period, based on the detection signal, generates a first operation quantity for the first feedback control based on the control quantity, generates a second operation quantity for the second feedback control based on the first and second state quantities, determines a sign of the second operation quantity from a relationship between the first and second state quantities, and generates an operation quantity on the target object from the first and second operation quantities.

Abstract: An apparatus detects movement of a target object, estimates a control quantity for first feedback control for the target object at a first period based on a detection signal, estimates a first state quantity of the target object and a second state quantity obtained by time differentiation of the first state quantity for second feedback control for the target object at a second period, shorter than the first period, based on the detection signal, generates a first operation quantity for the first feedback control based on the control quantity, generates a second operation quantity for the second feedback control based on the first and second state quantities, determines a sign of the second operation quantity from a relationship between the first and second state quantities, and generates an operation quantity on the target object from the first and second operation quantities.

Abstract: An apparatus for controlling movement of a target object generates a first operation quantity for first feedback control, and determines a second operation quantity for second feedback control in accordance with which of plural regions obtained by dividing a two-dimensional space defined by two variables of the first and second state quantities includes the first and second state quantities. The plural regions include first, second and third regions, the first region being provided between the second and third regions. The second operation quantity is determined so that the second operation quantity when the first and second state quantities are located in the first region is less than the second operation quantity when the first and second state quantities are located in the second region or the third region.

Abstract: An apparatus for controlling movement of a target object, generates a first operation quantity for first feedback control, and determines a second operation quantity for second feedback control in accordance with which of plural regions obtained by dividing a two-dimensional space defined by two variables of the first and second state quantities includes the first and second state quantities. The plural regions include first, second and third regions, the first region being provided between the second and third regions. The second operation quantity is determined so that the second operation quantity when the first and second state quantities are located in the first region is smaller than the second operation quantity when the first and second state quantities are located in the second region or the third region.

Abstract: According to an embodiment of the present invention, an electric apparatus for controlling movement of a target object by performing first and second feedback controls, based on a detection signal obtained from detecting the movement of the target object, generates an operation quantity on the target object based on first and second operation quantities for the second feedback control if one of a predetermined target value and an estimated first state quantity of the target object is larger than a first threshold value, and generates the operation quantity on the target object using only the first operation quantity out of the first and the second operation quantities if one of the target value and the first state quantity of the target object is smaller than the first threshold value.

Abstract: An apparatus detects movement of a target object, estimates a control quantity for first feedback control for the target object at a first period, based on a detection signal, estimates a first state quantity of the target object and a second state quantity obtained by time differentiation of the first state quantity for second feedback control for the target object at a second period shorter than the first period, based on the detection signal, generates a first operation quantity for the first feedback control based on the control quantity, generates a second operation quantity for the second feedback control based on the first and second state quantities, determines a sign of the second operation quantity from a relationship between the first and second state quantities, and generates an operation quantity on the target object from the first and second operation quantities.

Abstract: A carriage is precisely controlled in short-distance movement. The carriage is controlled upon printing by an inkjet printhead by reciprocally moving the carriage to which the printhead is mounted along a guide rail by a driving force supplied from a carriage motor. More specifically, a carriage position in the reciprocal direction is detected, and a carriage speed is calculated based on the detected positions. Then, the positions and carriage speed are fed back to control drive of the carriage motor. In the feedback-control, a loss due to friction generated between the carriage and the guide rail is compensated for with respect to a motor instruction value used to control drive of the carriage motor. The compensation is performed by identifying, based on the carriage speed, whether the friction is static or kinetic, and determining a compensation value in accordance with the identification.

Abstract: This invention is directed to precisely aligning a carriage in short-distance movement. A carriage is controlled upon printing by an inkjet printhead by reciprocally moving the carriage to which the printhead is mounted along a guide rail by a driving force supplied from a carriage motor. More specifically, a carriage position in the reciprocal direction is detected, and a carriage speed is calculated based on the detected positions. Then, the positions and carriage speed are fed back to control drive of the carriage motor. In the feedback-control, a loss due to friction generated between the carriage and the guide rail is compensated for with respect to a motor instruction value used to control drive of the carriage motor. The compensation is performed by identifying, based on the carriage speed, whether the friction is static or kinetic, and determining a compensation value in accordance with the identification.

Abstract: This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Abstract: This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Abstract: An anti-vibration apparatus has a feedback loop based on vibration information from an anti-vibration table, and a feedforward loop based on vibration information from a setting foundation. A compensation mechanism in the feedforward loop uses an adaptive filter. The adaptive filter sequentially sets parameters in the compensation mechanism on the basis of the vibration information form the anti-vibration table and setting foundation. The vibration information consists of vibration component information indicating vibrations in units of motion directions, and a determination mechanism and an operation switching mechanism arranged at the input side of the adaptive filter select the vibration component information and supply the selected information to the adaptive filter.

Abstract: A vibration type motor apparatus including a control system for applying a cyclic signal to an electro-mechanical energy conversion element to drive a vibration member, and obtaining a driving force therefrom. The system solves the problem of a dead band in the motor apparatus and provides a motor having good response characteristics and good controllability.

Abstract: This invention relates to a vibration wave motor which forms a vibration wave on a vibrating member by applying frequency signals having a phase difference therebetween to electro-mechanical energy conversion elements, and uses the vibration wave as a driving force. This invention provides a motor apparatus in which a disturbance component input to the motor apparatus is estimated based on input and output signals to the motor, and the estimated disturbance component is negatively fed back, thereby eliminating the influence of a disturbance.

Abstract: A high-performance feedback controller having both a target value followability and a disturbance suppression characteristic is provided, and its characteristic arrangement is as follows. In a feedback controller, which receives a target value r and a controlled variable y and supplies a manipulated variable u as a calculation output to a control object which has at least one input u as a manipulated variable and at least one output y as a controlled variable, a compensator G.sub.c (s), whose internal calculation arrangement is given by G.sub.c (s)=.alpha./{G.sub.n (0)-G.sub.n (s)} using a nominal model G.sub.n (s) as an approximate characteristic of the control object and an arbitrary positive parameter .alpha., performs a compensation of a comparison deviation (e=r-y) between the target value r and the controlled variable y.