Patents by Inventor Ivo Matteo Leonardus WEIJDEN

Ivo Matteo Leonardus WEIJDEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for evaluating control strategies in a semiconductor manufacturing process
    Patent number: 11372338
    Abstract: A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: June 28, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Ivo Matteo Leonardus Weijden, Jeroen Van Dongen, Cornelis Johannes Henricus Lambregts, Theo Wilhelmus Maria Thijssen, Ruud Rudolphus Johannes Catharinus De Wit, Hans Marinus Struijs, Erik Mathijs Maria Crombag, Roy Werkman, Maria Helena Schut, Erwin Riemens, Menno Meeldijk
  • METHOD FOR EVALUATING CONTROL STRATEGIES IN A SEMICONDUCTOR MANUFACTURING PROCESS
    Publication number: 20200401052
    Abstract: A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.
    Type: Application
    Filed: February 13, 2019
    Publication date: December 24, 2020
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Ivo Matteo Leonardus WEIJDEN, Jeroen VAN DONGEN, Cornelis Johannes Henricus LAMBREGTS, Theo Wilhelmus Maria THIJSSEN, Ruud Rudolphus Johannes Catharinus DE WIT, Hans Marinus STRUIJS, Erik Mathijs Maria CROMBAG, Roy WERKMAN, Maria Helena SCHUT, Erwin RIEMENS, Menno MEELDIJK