Abstract: By dividing a range within which a control device can be operated into a plurality of hierarchical operating levels corresponding to levels of different users of that control device, and inputting information such as the name and password of each of these users, the present invention makes it possible to set an operating level corresponding to each of these users. Once an operating level is set, an operating portion is configured to disable the operation of the control device in an operating range that exceeds this operating level. The configuration is such that switch portions of the operating panel are allocated to a certain operating level, but switch portions relating to operating levels other than the currently set operating level are disabled.

Abstract: An exclusive carrier (EQMC) housing therein equipment testing wafers (EQMW) is housed in a carrier housing rack (32) of a treatment equipment. An equipment testing parameter setting section (62) is provided for setting a cycle, in which the equipment testing wafers (EQMW) are carried in a heat treating furnace (21), and the number and holding position of the equipment testing wafers on a wafer boat (23). The equipment testing wafers (EQMW) are held in dummy wafer holding regions (D) at the upper and lower end portions of the wafer boat (23) to be heat-treated in the set cycle. After the heat treatments of all the equipment testing wafers (EQMW) in the equipment testing carrier (EQMC) are completed, the wafers (EQMW) are transferred to a detecting device, and the state of the treatment equipment is grasped on the basis of the treated state.

Abstract: One lot is a group of wafers-to-be-processed in one wafer carrier, and one lot region for one lot is allocated fixed to a holding region of a wafer boat. A variable lot region mode in which lot regions for 4, for example, lots are allocated to the wafer boat. When a lot number is less than 4, or numbers of sheets of wafers-to-be-processed in the respective lots are less than a prescribed number, the lot regions can be compressed, centered on a number of a set holding groove is prepared. On the other hand, in connection with transfer of monitor wafers, a mode in which monitor wafers are transferred to inter-lot regions, and a mode in which numbers of holding grooves can be designated are prepared. The former mode is selected in product monitor, and the latter mode is selected in apparatus monitor.

Abstract: The invention relates to a teaching method for instructing relative proximity locations to a loading arm that is used for loading objects to be processed in to or out of a support boat, the support boat being provided with a plurality of support portions for supporting the objects to be processed at a predetermined pitch along the length thereof. With this teaching method the loading arm is moved manually into the vicinity of one of the plurality of support portions that is positioned at an uppermost end of the support boat, a support portion positioned at a lowermost end thereof, and at least one support portion other than the two support portions; obtaining three-dimensional coordinates thereof; and these three-dimensional coordinates are stored in a storage portion. The three-dimensional coordinates for each of the others of the support portions are then derived on the basis of these stored values.

Abstract: An operation control device for use in an electric power supply system for supplying electric power from one electric power source to a plurality of electric power consuming systems, which can determine based on an outside signal whether or not the electric power consuming systems can proceed to operations includes an output electric power detecting unit for detecting electric power outputted by the electric power source; and a comparison control unit for comparing a detected value of the output electric power detecting unit with a preset reference value to output a comparison signal indicative of a result of the comparison as the outside signal to be supplied to the plural electric power consuming systems. The comparison signal indicating an inoperable state when the detected value exceeds the reference value, whereby the electric power consuming systems are permitted to proceed to steps of their operations or stand by.