Patents by Inventor Iztok Joel HACE

Iztok Joel HACE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONVECTIVE WAFER HEATING BY IMPINGEMENT WITH HOT GAS
    Publication number: 20160118274
    Abstract: An apparatus for processing wafer-shaped articles comprises a rotary chuck adapted to hold a wafer shaped article of a predetermined diameter in a predetermined orientation. The chuck includes a heater comprising a plurality of gas nozzles directed toward a surface of a wafer shaped article when held by the chuck. The heater comprises a gas inlet and at least one heating element for heating gas to be discharged through the plurality of gas nozzles. The heater is configured to heat a wafer shaped article principally by convective heat transfer from heated gas discharged through the plurality of gas nozzles.
    Type: Application
    Filed: October 28, 2014
    Publication date: April 28, 2016
    Applicant: LAM RESEARCH AG
    Inventors: Iztok Joel HACE, Martin NAVARRE