Patents by Inventor Izzy Lewis

Izzy Lewis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus
    Patent number: 7566873
    Abstract: One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: July 28, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: David Walker, Salam Harb, Vassil Spasov, David Stites, Izzy Lewis, Marian Mankos