Abstract: A vacuum valve including a valve seat having a valve opening defining an opening axis and a first seal surface circumferential around the valve opening and having a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has an at least two-component material composite having a metallic carrier component and a polymer-based seal material. The metallic carrier component defines an inner and outer carrier region and has a plurality of defined depressions extending in the inner carrier region by the seal surface. The seal material is applied to the carrier component such that a defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them at least halfway.

Abstract: Some embodiments may include a closure element for a vacuum valve that may be configured, for example, for the gastight closing of a process volume by means of cooperation with a vacuum valve opening of the vacuum valve. In some embodiments, the closure element may include a first sealing surface, corresponding to a second sealing surface of the vacuum valve opening, wherein the second sealing surface surrounds the vacuum valve opening, and a sealing material vulcanized onto the first sealing surface and in accordance with its course and having a defined height in the direction of the surface normal of the first sealing surface. In some embodiments, the sealing material may have a defined shape with respect to a sealing material cross section, comprising a first seal portion, provided on the process volume side, and a second seal portion, provided, in particular, facing away from the process volume.

Abstract: A vacuum valve including a valve seat having a valve opening defining an opening axis and a first seal surface circumferential around the valve opening and having a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has an at least two-component material composite having a metallic carrier component and a polymer-based seal material. The metallic carrier component defines an inner and outer carrier region and has a plurality of defined depressions extending in the inner carrier region by the seal surface. The seal material is applied to the carrier component such that a defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them at least halfway.

Abstract: Some embodiments may include a closure element for a vacuum valve that may be configured, for example, for the gastight closing of a process volume by means of cooperation with a vacuum valve opening of the vacuum valve. In some embodiments, the closure element may include a first sealing surface, corresponding to a second sealing surface of the vacuum valve opening, wherein the second sealing surface surrounds the vacuum valve opening, and a sealing material vulcanized onto the first sealing surface and in accordance with its course and having a defined height in the direction of the surface normal of the first sealing surface. In some embodiments, the sealing material may have a defined shape with respect to a sealing material cross section, comprising a first seal portion, provided on the process volume side, and a second seal portion, provided, in particular, facing away from the process volume.