Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

Abstract: An opening and closing device of an air vent for a vehicle is provided for raising or lowering the air vent so as to open or close a ventilating part. The opening and closing device includes first and second link parts rotatably provided at both sides of the ventilating part, a hydraulic cylinder part having one side fixed to the air vent and the other side connected to the first link part, a piston rod part having one side connected to the second link part and the other side slidably coupled to the hydraulic cylinder part, and an adjusting part fixing the piston rod part to not slide into the hydraulic cylinder part or release the piston rod part to be slidable.

Abstract: A flap door includes a door body configured to be rotated around a longitudinal axis of a shaft by extension of a gas lift. A guide cam is fixed to a sidewall and has the shaft rotatably mounted to a center of the guide cam in a direction perpendicular to the sidewall, and a guide groove is formed in a side of the guide cam. A first arm has one end fixed to the shaft and another end extended toward the gas lift. A second arm has one end connected to the shaft so as to be rotatable around the shaft and another end connected to an end of the gas lift. A rotation transferring member transfers a rotational force from the second arm to the first arm as the rotation transferring member moves along a slot formed in the second arm and simultaneously moves along the guide groove according to rotation of the second arm.

Abstract: An opening and closing device of an air vent for a vehicle is provided for raising or lowering the air vent so as to open or close a ventilating part. The opening and closing device includes first and second link parts rotatably provided at both sides of the ventilating part, a hydraulic cylinder part having one side fixed to the air vent and the other side connected to the first link part, a piston rod part having one side connected to the second link part and the other side slidably coupled to the hydraulic cylinder part, and an adjusting part fixing the piston rod part to not slide into the hydraulic cylinder part or release the piston rod part to be slidable.

Abstract: A flap door includes: a body rotated based on a shaft by extension of a gas lift extendable in a length direction to open or close a space; a guide cam fixedly installed to a sidewall and having the shaft rotatably installed at the center thereof in a direction perpendicular to the sidewall and a guide groove formed in a side thereof; a first arm having one end fixed to the shaft and another end extended toward the gas lift; a second arm having one end connected to the shaft to be rotatable around the shaft and another end rotatably connected to an end of the gas lift; and a rotation transferring member movably mounted in the groove and transferring a rotational force to the first arm while moving in a length direction of the second arm simultaneously with moving along the groove according to rotation of the second arm.