Patents by Inventor Jack F. Nimtz

Jack F. Nimtz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic wafer mapping in a wet environment on a wafer cleaner
    Patent number: 6356091
    Abstract: A wafer mapping method and apparatus for automatically determining the location and orientation of workpieces within a workpiece processing tool. An illumination device is provided which directs light toward the edges of the workpieces and a vision system is utilized to receive and process the images obtained from the light which is reflected off the edges of the workpieces.
    Type: Grant
    Filed: November 19, 1998
    Date of Patent: March 12, 2002
    Assignee: Speedfam-Ipec Corporation
    Inventors: Jack F. Nimtz, Toby Jordan, Robert Allen