Abstract: A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.

Abstract: A system and method for rapidly processing a specimen. The method includes generating a plurality of charged-particle beams travelling substantially along respective axes of an array of charged-particle beam columns by providing each beam column with two permanent magnets having at least one magnetic dipole disposed in a plane perpendicular to the axis. The trajectory of the beams is independently controlled and the beam is focussed onto the specimen using additional correctional coils. The beams are deflected while maintaining incidence of the beam on the specimen parallel to the axis. Preferably, the charged particle beams include non-crossover charged particle beams. Preferably, the method further includes detecting charged particles scattered from the specimen using a detector at least partially immersed in a magnetic field, by utilizing at least in part the magnetic field.

Abstract: A microscope arrangement for simultaneously inspecting a plurality of spots on the surface of a substrate includes at least one source of substantially parallel illumination directed non-parallel to the optical axis, an optical arrangement configured for directing the substantially parallel illumination to illuminate spaced apart spots on the surface of the substrate and for returning radiation from the spots, and an array of optical sensors. The optical arrangement includes an array of reflectors located and angled so as to generate an array of spaced illumination beams generally parallel to the optical axis, each reflector reflecting at least 90% of incident radiation intensity. Each of the optical sensors is spatially associated with a corresponding at least one of the reflectors so as to receive at least part of the radiation returned from the spot illuminated by the corresponding reflector.

Abstract: An auto-focus method for focusing an optical arrangement of a sub-micron optical system. The optical system includes a head, at least part of the optical arrangement being mechanically connected to the head. The optical arrangement is configured for reading from or writing to a surface of a medium. The head performs a scanning motion relative to the surface. The method includes illuminating at least part of a first viewing region of the surface by the optical arrangement while performing a focus range measurement of a second viewing region of the surface. The method also includes providing relative movement between the medium and the head in order for the optical arrangement to illuminate at least part of the second viewing region. The method additionally includes adjusting the focus of the optical arrangement based upon the focus range measurement.

Abstract: A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.

Abstract: An image sensor, comprising a substrate and an array of at least twenty radiation sensing regions disposed on the substrate. The sensing regions only have non-sensing regions therebetween. Each sensing region has a maximum dimension which is less than 50 microns. A spacing of the radiation sensing regions is at least 5 times the maximum dimension.

Abstract: A Cartesian scanning system for scanning a surface of a sample. The scanning system includes a light source assembly configured to produce at least one collimated beam of light, a light sensing system, a stage configured for mounting the sample thereon and a linear track having a direction of elongation. The linear track and the stage are configured to move relative to each other. The scanning system also includes a scanning head having a reflecting system which is configured to direct the collimated beam of light onto the surface and to direct a beam of light reflected from the surface to the light sensing system. The scanning head is slidably associated with the linear track so as to be moveable in a direction parallel to a direction of elongation of the linear track. Also included are a position determination system and a scan displacement correction system.

Abstract: A scanning system for scanning the surface of a sample. The system includes a scanning head, a mounting arrangement configured for mounting the sample thereon, a drive mechanism configured for providing relative motion between the scanning head and the mounting arrangement, an optical system and an adjustment mechanism. At least part of the optical system is included in the scanning head. The optical system is configured for simultaneously reading from at least two non-overlapping viewing regions of the surface. The adjustment mechanism is configured for adjusting at least part of the optical system so as to vary a spacing of the at least two non-overlapping viewing regions read by the optical system.

Abstract: A confocal microscope with diffractively formed virtual pinhole array includes a laser light source configuration configured to generate a beam of parallel light and a diffractive optical element deployed in a path of the beam. The diffractive optical element is configured to generate a virtual pinhole array in which a plurality of small spots are formed in a focal plane. A confocal microscope assembly is deployed with its illumination plane coincident with the virtual pinhole array.

Abstract: A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

Abstract: A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

Abstract: A Cartesian scanning system for scanning a surface of a sample. The scanning system includes a light source assembly configured to produce at least one collimated beam of light, a light sensing system, a stage configured for mounting the sample thereon and a linear track having a direction of elongation. The linear track and the stage are configured to move relative to each other. The scanning system also includes a scanning head having a reflecting system which is configured to direct the collimated beam of light onto the surface and to direct a beam of light reflected from the surface to the light sensing system. The scanning head is slidably associated with the linear track so as to be moveable in a direction parallel to a direction of elongation of the linear track. Also included are a position determination system and a scan displacement correction system.

Abstract: A method to scan a surface having a periodic pattern using a scanner. The periodic pattern has a first direction of periodicity having a periodic length. The scanner is configured to produce an image having a plurality of pixels, each of the pixels having a pixel origin. The method includes the steps of positioning the first direction of periodicity of the periodic pattern at an angle relative to the scanning direction of the scanner and scanning the surface by generating relative movement between the scanner and the surface.

Abstract: The method and apparatus particularly are applicable for displaying the fetal R-wave with respect to the maternal R-wave, and comprise the steps of generating a first electrical signal corresponding to the second derivative of the composite signal (maternal R-wave); generating a second electrical signal corresponding to the second derivative of the composite signal after the specified component has been removed; subtracting the second electrical signal from the first electrical signal to produce a third electrical signal; and utilizing the third electrical signal for indicating the repetition intervals (fetal R-waves) of the specified component.