Abstract: The present invention relates to a regulator having an electronic valve installed therein. The A regulator having an electronic valve installed therein, the regulator including: a first pressure reducing part connected to an inlet port; and a second pressure reducing part connected to the first pressure reducing part, wherein the second pressure reducing part includes: a pressure reducing chamber into which fuel is introduced from the first pressure reducing part; an orifice formed in the pressure reducing chamber; a valve shaft for opening and closing the orifice; a diaphragm for moving the valve shaft by use of an input pressure and an output pressure; and a spring for resiliently supporting the diaphragm, wherein an auxiliary conduit is formed to interconnect the pressure reducing chamber and an upper space of the diaphragm, and an electronic valve for controlling the pressure of an outlet port is installed on the auxiliary conduit.

Abstract: The present invention relates to a pipe joint structure for a semiconductor processing, comprising: a first pipe joint; a second pipe joint; a gasket inserted into adjacent surfaces of the first pipe joint and the second pipe joint; and a screw for bringing the adjacent surfaces of the first pipe joint and the second pipe joint into close contact with the gasket, wherein the first pipe joint has an annular indented groove formed in the center of the adjacent surface thereof, the second pipe joint has a protrusion portion formed on the adjacent surface thereof so as to correspond to the indented groove, and the gasket has a second protrusion portion and a second indented groove which are respectively formed on both side surfaces thereof so as to correspond to the indented groove and the protrusion portion.