Abstract: Disclosed is a chemical mechanical polishing pad formed at a polishing surface thereof with micro-holes each having a desired cross-sectional area while having a desired depth. The shape, size, and density of the micro-holes can be optionally adjusted. The chemical mechanical polishing pad provides an effect of maintaining a desired polishing rate during a polishing process. In accordance with the present invention, the micro-holes can have diverse arrangements depending on given process conditions.

Abstract: Disclosed is a method for forming micro-holes, perforated holes, or grooves on a chemical mechanical polishing pad by a laser. This method involves the steps of determining a pattern of micro-holes, grooves, or perforated holes to be formed on a polishing pad, inputting the determined pattern to a computer numerical control (CNC) controller, and driving a laser device adapted to irradiate a laser beam and a table adapted to conduct a three-dimensional movement and rotation while supporting the polishing pad, under the control of the CNC controller based on the inputted pattern, thereby irradiating the laser beam from the laser device onto the polishing pad supported by the table while moving the table in accordance with the inputted pattern, so that micro-holes, grooves, or perforated holes having a pattern corresponding to the determined pattern are formed on the polishing pad.