Abstract: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

Abstract: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

Abstract: Disclosed is a transfer device (5) for substrates used for producing electronic components or displays. Said transfer device (5) is used for delivering substrates to a process station (4) and comprises a first feeding/discharge interface (7) to an overhead conveying system (1) for substrate transport boxes (2) as well as a second feeding/discharge interface (26) to the process station (4). The first interface (7) is located above the second interface (26) relative to a vertical direction. In order to provide such a transfer device (5) with greater flexibility in terms of the order in which the conveyed substrates are delivered to process stations (4) in an interlinked production plant for conveying substrates in transport boxes (2), said transfer device (5) comprises means (24, 25, 27) which allow the substrates to be conveyed from one interface (7) to the other (26) free from transport boxes (2) with the help of a handling mechanism (12) that is arranged within the transfer device (5).

Abstract: A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

Abstract: To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

Abstract: A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Abstract: A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis.

Abstract: To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

Abstract: A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that different faces of the object are simultaneously cleaned. At least two gas feeding devices, having one means each for directing a gas flow onto the surface of the object to be cleaned, open into a cleaning chamber supplying a pressurized cleaning gas. At least two extraction means are connected to the outside of the cleaning chamber for discharging the gas fed to the cleaning chamber. The object can be introduced into the cleaning chamber through at least one gap. At least two ionization means are used to ionize the gas and the particles that are present in the cleaning chamber. One ionization means each is mounted between a direction means and an extraction means.

Abstract: A device for reading and identifying a plate, with a camera means (100) with an optical device (110; 112, 114)) for digital image recording and an image processing device for the analysis of the image recorded by the camera means (100). In one embodiment, identification codes can be imaged from both sides of the plate (20)* by a mirror means (120; 122, 124, 126) onto the optical device (110; 112, 114) of the camera. The device is designed in such a way that each plate (40) can be recorded with two camera images, wherein a camera image is produced through the arrangement of several mirrors (122, 124, 126) of the mirror means (120) in such a way that one image half represents the right edge and the other image half represents the left edge of the plate (40) over a predetermined length.

Abstract: A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis.

Abstract: A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

Abstract: A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

Abstract: A device for reading and identifying a plate, with a camera means (100) with an optical device (110; 112, 114)) for digital image recording and an image processing device for the analysis of the image recorded by the camera means (100). In one embodiment, identification codes can be imaged from both sides of the plate (20)* by a mirror means (120; 122, 124, 126) onto the optical device (110; 112, 114) of the camera. The device is designed in such a way that each plate (40) can be recorded with two camera images, wherein a camera image is produced through the arrangement of several mirrors (122, 124, 126) of the mirror means (120) in such a way that one image half represents the right edge and the other image half represents the left edge of the plate (40) over a predetermined length.

Abstract: The invention relates to a storage device for the intermediate storage of articles such as substrates, wafers, especially test wafers, and the like, used in the production of semiconductor elements. The aim of the invention is to provide a corresponding device with which said articles can be assembled in a stack or a batch in an efficient manner while meeting the strict requirements made on clean room conditions. To this end, the storage device is provided with a housing that includes an inner chamber in which, in a loading/unloading zone, a device for introducing the articles into and removing them from the housing is provided. At least one closable opening is provided on said housing through which the articles are introduced and removed, as well as a first handling device for handling the articles in the loading/unloading zone. The articles can be arranged in the inner chamber in open transportable storage means, such as magazines, the inner chamber disposing of storage locations for the storage means.

Abstract: The invention relates to a storage and buffer system (12) for connection to transport units for containers, such as for example, cassettes (7), FOUP pods (8), or SMIF boxes for the storage of wafers (9) and similar, comprising a number of conveyor elements (1), arranged along a conveyor line (13), whereby the conveyor elements (1) are arranged in at least one storage line (14), running essentially horizontal, next to, under or over the transport line (13), whilst maintaining a transfer position relative to the adjacent conveyor elements (1). The system further comprise a means of rotation (17) with at least one conveyor element (1), by means of which the containers (7,8) can be transferred in a horizontal direction from the conveyor line (13) to a storage line (14)and a vice versa, or from one storage line to another.

Abstract: The invention relates to a cleaning device for use in the production of semiconductors components. Said cleaning device comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned (9), especially an article used in semiconductor production so that different faces of said article (9) are simultaneously cleaned. At least two gas feeding devices (5) open into a cleaning chamber (42), supplying a pressurized cleaning gas. Said gas feeding devices (5) are provided with one means (50) each for directing a gas flow onto the surface of the article to be cleaned (9). At least two extraction means (53) are connected to the outside of the cleaning chamber (42) through which the gas fed to the cleaning chamber (42) is discharged. The article (9) can be introduced into the cleaning chamber (42) through at least one gap (56). At least two ionization means (52) are used to ionize the gas and the particles that are present in the cleaning chamber (42).

Abstract: An apparatus and a method for handling individual wafers (2) that are temporarily in an essentially horizontal position. The apparatus (1) comprises at least one supporting part (5) with supporting areas (6), comprising at least three supporting points (9), for supporting an edge region of the wafer, and at least one holding part (7) with holding areas (8), comprising at least two holding points (10), for gripping the edge (4) of this wafer (2), with the holding points (10) being moveable relative to the supporting points (9) and, to grasp the wafer (2), relative to one another. Moreover, at least one of these holding points (10) is arranged on a rotatable rod (12) designed, for reliable holding of the wafer, as a holding part (7), with rod (12) extending coaxially with an axis (11) running through the wafer center (3) and essentially parallel to the surface of the wafer (2).

Abstract: In order to achieve a higher compaction ratio with a wafer transfer apparatus for transferring wafers stacked in an interspaced manner in a first holding device, e.g.

Abstract: For removing and transporting several spaced, parallel wafers stored in a container, a gripping device is provided. The gripping device has a holding rake and several gripping heads which can be rotated with respect to the holding rake. In one swivel position, the gripping heads are moved through between the wafers and then swivelled into another swivel position. In this latter position, the gripping heads are brought to a stop against the edges of the wafers movement of the gripping device, and then the opposite edges of the wafer disks are brought to stop against the counterholder by displacement of the counterholder. All wafers contained in the container are thus simultaneously securely held and can be displaced out of the container. In order to then swivel the wafers, the holding rake which has slots for receiving the wafer edges is also stopped at the wafer edges, and the counterholder is then pushed back. The wafers are therefore securely swivelled.