Patents by Inventor James Akutsu

James Akutsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for inspecting a workpiece surface using surface structure spatial frequencies
    Patent number: 7286218
    Abstract: A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.
    Type: Grant
    Filed: December 17, 2005
    Date of Patent: October 23, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Timothy R. Tiemeyer, James Akutsu
  • System and method for inspecting a workpiece surface using surface structure spatial frequencies
    Publication number: 20060197945
    Abstract: A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.
    Type: Application
    Filed: December 17, 2005
    Publication date: September 7, 2006
    Inventors: Thimothy Tiemeyer, James Akutsu