Patents by Inventor James Cordingley
James Cordingley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230405713Abstract: A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into at least one sub-beam deflected toward the surface being processed; guiding the sub-beam through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.Type: ApplicationFiled: May 24, 2023Publication date: December 21, 2023Applicant: IPG PHOTONICS CORPORATIONInventors: Alexander LIMANOV, Michael VON DADELSZEN, Joshua SCHOENLY, James CORDINGLEY, Manuel LEONARDO
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Patent number: 11673208Abstract: A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.Type: GrantFiled: July 31, 2018Date of Patent: June 13, 2023Assignee: IPG PHOTONICS CORPORATIONInventors: Alexander Limanov, Michael Von Dadelszen, Joshua Schoenly, James Cordingley, Manuel Leonardo
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Publication number: 20210008660Abstract: A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.Type: ApplicationFiled: July 31, 2018Publication date: January 14, 2021Inventors: Alexander LIMANOV, Michael VON DADELSZEN, Joshua SCHOENLY, James CORDINGLEY, Manuel LEONARDO
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Publication number: 20160370614Abstract: Numerous embodiments concerning methods and apparatus for processing a workpiece are disclosed. In one embodiment, an electronic display device having a plurality of viewing elements is provided, wherein a viewing element includes a color element and at least one viewing element exhibits a bright pixel defect. The color element of the viewing element exhibiting the bright pixel defect can be darkened by irradiating the color element with at least one laser pulse having a pulse duration in a range from 1 ps to 40 ps.Type: ApplicationFiled: June 14, 2016Publication date: December 22, 2016Inventors: Guillaume Blanchette, James Cordingley, Joseph John Griffiths
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Patent number: 9036247Abstract: The invention provides a method of laser processing with a thermally stabilized acousto-optic beam deflector.Type: GrantFiled: October 18, 2013Date of Patent: May 19, 2015Assignee: Electro Scientific Industries, Inc.Inventors: James Cordingley, Dimitry Maltsev
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Publication number: 20140098410Abstract: The invention provides a method of laser processing with a thermally stabilized acousto-optic beam deflector.Type: ApplicationFiled: October 18, 2013Publication date: April 10, 2014Applicant: Electro Scientific Industries, Inc.Inventors: James Cordingley, Dimitry Maltsev
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Patent number: 8593722Abstract: The invention provides a method of laser processing that includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.Type: GrantFiled: July 5, 2012Date of Patent: November 26, 2013Assignee: Electro Scientific Industries, Inc.Inventors: James Cordingley, Dimitry Maltsev
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Patent number: 8367968Abstract: Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.Type: GrantFiled: January 3, 2008Date of Patent: February 5, 2013Assignee: GSI Group CorporationInventors: James Cordingley, Dimitry Maltsev, Michael Plotkin
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Publication number: 20130010349Abstract: The invention provides a method of laser processing that includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.Type: ApplicationFiled: July 5, 2012Publication date: January 10, 2013Applicant: GSI GROUP CORPORATIONInventors: James Cordingley, Dimitry Maltsev
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Publication number: 20080164240Abstract: Laser pulses are selected from a group of closely spaced laser pulses with an optical modulator by adjusting pulse timing relative to an impingement interval. An adjusted pulse is moved from an impingement interval to a non-impingement interval and is blocked. The blocked laser source is stabilized by running nearly continuously. Pulse selection with multiple laser sources is achieved with a single acousto-optic modulator.Type: ApplicationFiled: January 3, 2008Publication date: July 10, 2008Applicant: GSI GROUP CORPORATIONInventors: James Cordingley, Dimitry Maltsev, Michael Plotkin
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Publication number: 20080094640Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.Type: ApplicationFiled: December 21, 2006Publication date: April 24, 2008Inventors: James Cordingley, Joseph Griffiths, Shepard Johnson, Donald Smart
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Publication number: 20070215820Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.Type: ApplicationFiled: December 20, 2006Publication date: September 20, 2007Inventors: James Cordingley, Jonathan Ehrmann, David Filgas, Shepard Johnson, Joohan Lee, Donald Smart, Donald Svetkoff
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Publication number: 20070199927Abstract: Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.Type: ApplicationFiled: January 31, 2007Publication date: August 30, 2007Inventors: Bo Gu, Donald Smart, James Cordingley, Joohan Lee, Donald Svetkoff, Shepard Johnson, Jonathan Ehrmann
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Publication number: 20070173075Abstract: A laser-based method and system for selectively processing a multi-material device having a target link structure formed on a substrate while avoiding undesirable change to an adjacent link structure also formed on the substrate are disclosed. The method includes applying at least one focused laser pulse having a wavelength into a spot. The at least one focused laser pulse has an energy density over the spot sufficient to completely process the target link structure while avoiding undesirable change to the adjacent link structure, the substrate and any layers between the substrate and the link structures. The target link structure and the adjacent structure may have a pitch of about 2.0 microns or less.Type: ApplicationFiled: January 29, 2007Publication date: July 26, 2007Inventors: Joohan Lee, James Cordingley, Bo Gu, Jonathan Ehrmann, Joseph Griffiths
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Publication number: 20070075058Abstract: A precision, laser-based method and system for high-speed, sequential processing of material of targets within a field are disclosed that control the irradiation distribution pattern of imaged spots. For each spot, a laser beam is incident on a first anamorphic optical device and a second anamorphic optical device so that the beam is controllably modified into an elliptical irradiance pattern. The modified beam is propagated through a scanning optical system with an objective lens to image a controlled elliptical spot on the target. In one embodiment, the relative orientations of the devices along an optical axis are controlled to modify the beam irradiance pattern to obtain an elliptical shape while the absolute orientation of the devices controls the orientation of the elliptical spot.Type: ApplicationFiled: December 1, 2006Publication date: April 5, 2007Applicant: GSI Lumonics CorporationInventors: Jonathan Ehrmann, James Cordingley, Donald Smart, Donald Svetkoff
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Publication number: 20070052791Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.Type: ApplicationFiled: November 7, 2006Publication date: March 8, 2007Applicant: GSI Lumonics CorporationInventors: James Cordingley, Jonathan Ehrmann, David Filgas, Shepard Johnson, Joohan Lee, Donald Smart, Donald Svetkoff
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Publication number: 20060283845Abstract: The invention provides a system and method for vaporizing a target structure on a substrate. According to the invention, a calculation is performed, as a function of wavelength, of an incident beam energy necessary to deposit unit energy in the target structure. Then, for the incident beam energy, the energy expected to be deposited in the substrate as a function of wavelength is calculated. A wavelength is identified that corresponds to a relatively low value of the energy expected to be deposited in the substrate, the low value being substantially less than a value of the energy expected to be deposited in the substrate at a higher wavelength. A laser system is provided configured to produce a laser output at the wavelength corresponding to the relatively low value of the energy expected to be deposited in the substrate.Type: ApplicationFiled: May 24, 2006Publication date: December 21, 2006Inventors: William Lauer, Pierre Trepagnier, Donald Smart, James Cordingley, Michael Plotkin
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Publication number: 20060216927Abstract: A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.Type: ApplicationFiled: May 26, 2006Publication date: September 28, 2006Applicant: GSI Lumonics CorporationInventors: James Cordingley, Jonathan Ehrmann, Joseph Griffiths, Joohan Lee, Donald Smart, Donald Svetkoff
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Publication number: 20060207975Abstract: A precision, laser-based method and system for high-speed, sequential processing of material of targets within a field are disclosed that control the irradiation distribution pattern of imaged spots. For each spot, a laser beam is incident on a first anamorphic optical device and a second anamorphic optical device so that the beam is controllably modified into an elliptical irradiance pattern. The modified beam is propagated through a scanning optical system with an objective lens to image a controlled elliptical spot on the target. In one embodiment, the relative orientations of the devices along an optical axis are controlled to modify the beam irradiance pattern to obtain an elliptical shape while the absolute orientation of the devices controls the orientation of the elliptical spot.Type: ApplicationFiled: May 2, 2006Publication date: September 21, 2006Applicant: GSI Lumonics CorporationInventors: Jonathan Ehrmann, James Cordingley, Donald Smart, Donald Svetkoff
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Publication number: 20060191884Abstract: A high-speed, precise, laser-based material processing method and system are provided wherein relative movement of target material and a pulsed laser output used to process the material are synchronized. The laser-based system includes a pulsed laser source for generating a set of laser pulses, and a laser output control that controllably selects a subset of pulses from the set of laser pulses at a position beyond the laser source to obtain the pulsed laser output. The laser-based system further includes a mechanism for synchronizing the pulsed laser output with relative movement of the target material. A beam delivery and focusing subsystem delivers at least a portion of the synchronized pulsed laser output to the target material as a laser material processing output to process the target material. A positioning subsystem moves the target material relative to the pulsed laser output.Type: ApplicationFiled: January 18, 2006Publication date: August 31, 2006Inventors: Shepard Johnson, Bo Gu, James Cordingley