Patents by Inventor James Jianguo Xu
James Jianguo Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9645381Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: GrantFiled: April 21, 2015Date of Patent: May 9, 2017Assignee: Zeta Instruments, Inc.Inventors: Ken Kinsun Lee, Ronny Soetaman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandla, Ben Garland
-
Publication number: 20160252714Abstract: A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.Type: ApplicationFiled: May 9, 2016Publication date: September 1, 2016Inventors: Zhen Hou, James Jianguo Xu, Ken Kinsun Lee, James Nelson Stainton, Hung Phi Nguyen, Rusmin Kudinar, Ronny Soetarman
-
Publication number: 20160253813Abstract: A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.Type: ApplicationFiled: May 9, 2016Publication date: September 1, 2016Inventors: Zhen Hou, James Jianguo Xu, Ken Kinsun Lee, James Nelson Stainton, Hung Phi Nguyen, Rusmin Kudinar, Ronny Soetarman
-
Patent number: 9389408Abstract: A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.Type: GrantFiled: June 29, 2011Date of Patent: July 12, 2016Assignee: Zeta Instruments, Inc.Inventors: Zhen Hou, James Jianguo Xu, Ken Kinsun Lee, James Nelson Stainton, Hung Phi Nguyen, Rusmin Kudinar, Ronny Soetarman
-
Publication number: 20150226953Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: ApplicationFiled: April 21, 2015Publication date: August 13, 2015Inventors: Ken Kinsun Lee, Ronny Soetaman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandla, Ben Garland
-
Publication number: 20150226952Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: ApplicationFiled: April 21, 2015Publication date: August 13, 2015Inventors: Ken Kinsun Lee, Ronny Soetaman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandla, Ben Garland
-
Patent number: 9036869Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: GrantFiled: August 29, 2011Date of Patent: May 19, 2015Assignee: Zeta Instruments, Inc.Inventors: Ken Kinsun Lee, Ronny Soetarman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandla, Ben Garland
-
Patent number: 8976366Abstract: A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.Type: GrantFiled: June 12, 2012Date of Patent: March 10, 2015Assignee: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
-
Publication number: 20120327414Abstract: A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.Type: ApplicationFiled: June 12, 2012Publication date: December 27, 2012Applicant: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
-
Publication number: 20120176475Abstract: A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).Type: ApplicationFiled: December 21, 2011Publication date: July 12, 2012Applicant: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
-
Patent number: 8184364Abstract: A compact and low cost microscope illuminator capable of generating 3-D optical images includes a first light source and a second light source. The two light sources lead two optical paths: one to illuminate a sample and another to project a pattern onto the focal plane of a microscope objective lens. The two light sources are controlled by a processor and can be turned on and off rapidly. A 3-D optical microscope equipped with said microscope illuminator and a method of creating a 3-D image on said 3-D optical microscope are also described.Type: GrantFiled: June 27, 2008Date of Patent: May 22, 2012Assignee: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Patent number: 8174762Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: GrantFiled: February 3, 2010Date of Patent: May 8, 2012Assignee: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Publication number: 20120051660Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: ApplicationFiled: August 29, 2011Publication date: March 1, 2012Applicant: Zeta Instruments, Inc.Inventors: Ken Kinsun Lee, Ronny Soetarman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandia, Ben Garland
-
Publication number: 20120019626Abstract: A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.Type: ApplicationFiled: June 29, 2011Publication date: January 26, 2012Applicant: Zeta Instruments, Inc.Inventors: Zhen Hou, James Jianguo Xu, Ken Kinsun Lee, James Nelson Stainton, Hung Phi Nguyen, Rusmin Kudinar, Ronny Soetarman
-
Patent number: 7944609Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: GrantFiled: February 3, 2010Date of Patent: May 17, 2011Assignee: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Publication number: 20100134595Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: ApplicationFiled: February 3, 2010Publication date: June 3, 2010Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Publication number: 20100135573Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: ApplicationFiled: February 3, 2010Publication date: June 3, 2010Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Patent number: 7729049Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: GrantFiled: May 26, 2007Date of Patent: June 1, 2010Assignee: Zeta Instruments, Inc.Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Publication number: 20080291533Abstract: A compact and low cost microscope illuminator capable of generating 3-D optical images includes a first light source and a second light source. The two light sources lead two optical paths: one to illuminate a sample and another to project a pattern onto the focal plane of a microscope objective lens. The two light sources are controlled by a processor and can be turned on and off rapidly. A 3-D optical microscope equipped with said microscope illuminator and a method of creating a 3-D image on said 3-D optical microscope are also described.Type: ApplicationFiled: June 27, 2008Publication date: November 27, 2008Inventors: James Jianguo Xu, Ken Kinsun Lee
-
Publication number: 20080291532Abstract: A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.Type: ApplicationFiled: May 26, 2007Publication date: November 27, 2008Inventors: James Jianguo Xu, Ken Kinsun Lee