Patents by Inventor James Omer L'Heureux

James Omer L'Heureux has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Parameter sensing and computer modeling for gas delivery health monitoring
    Patent number: 11768984
    Abstract: A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: September 26, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Ala Moradian, James Omer L'Heureux, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang, Umesh Madhav Kelkar, Gopalakrishna B. Prabhu, Zheng Yuan, Jeonghoon Oh
  • PARAMETER SENSING AND COMPUTER MODELING FOR GAS DELIVERY HEALTH MONITORING
    Publication number: 20220092241
    Abstract: A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.
    Type: Application
    Filed: September 22, 2020
    Publication date: March 24, 2022
    Inventors: Ala Moradian, James Omer L'Heureux, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang, Umesh Madhav Kelkar, Gopalakrishna B. Prabhu, Zheng Yuan, Jeonghoon Oh