Patents by Inventor James Patrick Collins

James Patrick Collins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection of a gaseous substance emanating from a layer of polymeric composition
    Patent number: 6479018
    Abstract: Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: November 12, 2002
    Assignee: International Business Machines Corporation
    Inventors: James Patrick Collins, Laird Chandler MacDowell, Wayne Martin Moreau, Michael Santarelli
  • Detection of a gaseous substance emanating from a layer of polymeric composition
    Publication number: 20010001370
    Abstract: Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.
    Type: Application
    Filed: January 16, 2001
    Publication date: May 24, 2001
    Inventors: James Patrick Collins, Laird Chandler MacDowell, Wayne Martin Moreau, Michael Santarelli
  • Detection of a gaseous substance emanating from a layer of polymeric composition
    Patent number: 6235452
    Abstract: Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.
    Type: Grant
    Filed: August 5, 1999
    Date of Patent: May 22, 2001
    Assignee: International Business Machines Corporation
    Inventors: James Patrick Collins, Laird Chandler MacDowell, Wayne Martin Moreau, Michael Santarelli