Patents by Inventor James R. Willis

James R. Willis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling
    Patent number: 6855916
    Abstract: A method for thermally processing a substrate provides a target substrate temperature and generates a move profile of the substrate within a thermal processing system. An amount of heat is provided to the substrate, and one or more temperatures associated with one or more respective locations on the substrate are measured. A predicted temperature profile is further generated, wherein a predicted temperature of the substrate is based on the amount of heat provided and the one or more measured temperatures. The amount of heat provided to the substrate is further regulated, based on the predicted temperature profile, wherein the substrate is thermally processed generally according to the intended substrate temperature profile. The amount of heat provided to the substrate can be further regulated by controlling a position of the substrate within the thermal processing system.
    Type: Grant
    Filed: December 10, 2003
    Date of Patent: February 15, 2005
    Assignee: Axcelis Technologies, Inc.
    Inventors: Brian Matthews, James R. Willis, Paul E. Lustiber
  • Vehicle license plate holder
    Patent number: 5870841
    Abstract: A license plate holder provided with a flat backing plate to which a transparent cover is hinged at the base thereof and which may be readily removable from the backing plate at the top thereof.
    Type: Grant
    Filed: May 15, 1997
    Date of Patent: February 16, 1999
    Inventors: William M. Brody, II, James R. Willis