Abstract: A method including executing a logical computing element (LCE) on a server. Worker LCEs are executed on the server. A first electronic file comprising geometry data in a first data structure is received at the controller LCE. An available worker LCE is identified, by the controller LCE, as an in-use worker LCE from among the worker LCEs. The geometry data is imported by the in-use worker LCE. A job instance is established by the in-use worker LCE. A rendering engine is launched by the in-use worker LCE. The rendering engine generates, for the job instance and using the geometry data, a dataset file in a second data structure different than the first data structure. The dataset file is returned by the in-use worker LCE to the controller LCE. The dataset file is returned by the controller LCE to a remote computer.

Abstract: A method of manufacturing MEMS structures and devices that allows the fabrication of dielectric structures with improved etch selectivity and good electrical leakage characteristics. The dielectric structure includes a composite stack of silicon nitride sub-layers with a silicon-rich nitride sub-layer and a stoichiometric silicon nitride sub-layer at opposite ends of the stack. Alternatively, the dielectric structure includes a single silicon nitride layer providing a graded change in silicon content through the dielectric layer, from silicon-rich nitride to stoichiometric silicon nitride.

Abstract: A method of manufacturing MEMS structures and devices that allows the fabrication of dielectric structures with improved etch selectivity and good electrical leakage characteristics. The dielectric structure includes a composite stack of silicon nitride sub-layers with a silicon-rich nitride sub-layer and a stoichiometric silicon nitride sub-layer at opposite ends of the stack. Alternatively, the dielectric structure includes a single silicon nitride layer providing a graded change in silicon content through the dielectric layer, from silicon-rich nitride to stoichiometric silicon nitride.