Patents by Inventor James Thomas Hallowell

James Thomas Hallowell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTEGRATED CIRCUIT HAVING IMPROVED ASML ALIGNMENT MARKS
    Publication number: 20230134102
    Abstract: A photo alignment structure is provided that includes a wafer having scribe lines defined therein in a top planar surface of the wafer. An alignment structure is disposed on a top planar surface of the wafer longitudinally aligned with a portion of selected scribe lines, where the alignment structure is comprised of metal layers. A slot is defined along a longitudinal axis of the alignment structure in at least one of the metal layers.
    Type: Application
    Filed: October 29, 2021
    Publication date: May 4, 2023
    Inventors: Stephen Arlon Meisner, James Thomas Hallowell, Michael Todd Wyant