Patents by Inventor Jan Bouman
Jan Bouman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11892776Abstract: Apparatuses and techniques for suppressing a zeroth order portion of a configured radiation beam. In some embodiments, an extreme ultraviolet (EUV) lithographic apparatus for forming an image on a substrate by use of an EUV radiation beam that is configured by a patterning device comprising a pattern of reflective regions and partially reflective regions, wherein the partially reflective regions are configured to suppress and apply a phase shift to a portion of the EUV radiation beam, may include a projection system. The projection system may be configured to suppress a zeroth order portion of a configured EUV radiation beam, and direct an unsuppressed portion of a configured EUV radiation beam towards a substrate to form an image on the substrate.Type: GrantFiled: December 12, 2019Date of Patent: February 6, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Johannes Jacobus Matheus Baselmans, Duan-Fu Stephen Hsu, Willem Jan Bouman, Frank Jan Timmermans, Marie-claire Van Lare
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Publication number: 20220066327Abstract: Apparatuses and techniques for suppressing a zeroth order portion of a configured radiation beam. In some embodiments, an extreme ultraviolet (EUV) lithographic apparatus for forming an image on a substrate by use of an EUV radiation beam that is configured by a patterning device comprising a pattern of reflective regions and partially reflective regions, wherein the partially reflective regions are configured to suppress and apply a phase shift to a portion of the EUV radiation beam, may include a projection system. The projection system may be configured to suppress a zeroth order portion of a configured EUV radiation beam, and direct an unsuppressed portion of a configured EUV radiation beam towards a substrate to form an image on the substrate.Type: ApplicationFiled: December 12, 2019Publication date: March 3, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Johannes Jacobus Matheus BASELMANS, Duan-Fu Stephen HSU, Willem Jan BOUMAN, Frank Jan TIMMERMANS, Marie-Claire VAN LARE
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Patent number: 10324384Abstract: An immersion lithographic apparatus including: a liquid confinement structure configured to supply and confine immersion liquid to an immersion space between a final lens element of a projection system and a surface of the substrate and/or of a substrate table; and a passageway-former between the projection system and the liquid confinement structure, and a passageway between the passageway-former and an optically active part of the final lens element, the passageway being in liquid communication via an opening with the immersion space and extending radially outwardly, with respect to an optical axis of the projection system, at least to an edge of an exposed bottom surface of the final lens element and being constructed and configured such that in use it is filled with liquid from the immersion space by capillary action.Type: GrantFiled: June 4, 2015Date of Patent: June 18, 2019Assignee: ASML Netherlands B.V.Inventors: Gerben Pieterse, Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Theodorus Marinus Modderman, Cornelius Maria Rops, Bart Smeets, Koen Steffens, Ronald Van Der Ham
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Publication number: 20180210350Abstract: An immersion lithographic apparatus including: a liquid confinement structure configured to supply and confine immersion liquid to an immersion space between a final lens element of a projection system and a surface of the substrate and/or of a substrate table; and a passageway-former between the projection system and the liquid confinement structure, and a passageway between the passageway-former and an optically active part of the final lens element, the passageway being in liquid communication via an opening with the immersion space and extending radially outwardly, with respect to an optical axis of the projection system, at least to an edge of an exposed bottom surface of the final lens element and being constructed and configured such that in use it is filled with liquid from the immersion space by capillary action.Type: ApplicationFiled: June 4, 2015Publication date: July 26, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Gerben PIETERSE, Theodorus Wilhelmus POLET, Johannes Jacobus Matheus BASELMANS, Willem Jan BOUMAN, Theodorus Marinus MODDERMAN, Cornelius Maria ROPS, Bart SMEETS, Koen STEFFENS, Ronald VAN DER HAM
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Publication number: 20180196354Abstract: A lithographic apparatus includes a projection system configured to project a patterned radiation beam through the projection system onto a target portion of a substrate. A liquid confinement structure confines an immersion liquid in a space between the projection system and the substrate. The projection system includes: an exit surface through which to project the patterned radiation beam; and a further surface facing the liquid confinement structure. The further surface has a first static receding contact angle with respect to the immersion liquid. The exit surface has a second static receding contact angle with respect to the immersion liquid. The first static receding contact angle is: greater than the second static receding contact angle; and less than 65 degrees.Type: ApplicationFiled: July 13, 2016Publication date: July 12, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Cornelius Maria ROPS, Willem Jan BOUMAN, Theodorus Wilhelmus POLET
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Patent number: 10001712Abstract: An immersion lithographic apparatus includes a projection system. The projection system is configured to project a patterned radiation beam through an immersion liquid onto a target portion of a substrate. An external surface of the projection system includes a first surface. The first surface has a non-planar shape. An element is attached to the first surface and positioned so that at least a portion of the element contacts the immersion liquid in use. The element includes a closed loop of continuously integral material in a preformed state and conforms to the non-planar shape of the first surface.Type: GrantFiled: June 26, 2015Date of Patent: June 19, 2018Assignee: ASML NETHERLANDS B.V.Inventors: Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman, Cornelius Maria Rops, Bart Smeets, Koen Steffens, Ronald Van Der Ham
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Publication number: 20170219939Abstract: An immersion lithographic apparatus includes a projection system. The projection system is configured to project a patterned radiation beam through an immersion liquid onto a target portion of a substrate. An external surface of the projection system includes a first surface. The first surface has a non-planar shape. An element is attached to the first surface and positioned so that at least a portion of the element contacts the immersion liquid in use. The element includes a closed loop of continuously integral material in a preformed state and conforms to the non-planar shape of the first surface.Type: ApplicationFiled: June 26, 2015Publication date: August 3, 2017Applicant: ASML Netherlands B.V.Inventors: Theodorus Wilhelmus POLET, Johannes Jacobus BASELMANS, Willem Jan BOUMAN, Han Henricus Aldegonda LEMPENS, Theodorus Marinus MODDERMAN, Cornelius Maria ROPS, Bart SMEETS, Koen STEFFENS, Ronald VAN DER HAM
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Patent number: 8885144Abstract: An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.Type: GrantFiled: May 24, 2011Date of Patent: November 11, 2014Assignee: ASML Netherlands B.V.Inventors: Bert Jan Claessens, Heine Melle Mulder, Paul Van Der Veen, Wilfred Edward Endendijk, Willem Jan Bouman, Bert Pieter Van Drieënhuizen, Jozef Ferdinand Dymphna Verbeeck, Marc Hendricus Margaretha Dassen, Thijs Johan Henry Hollink
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Publication number: 20110310372Abstract: An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.Type: ApplicationFiled: May 24, 2011Publication date: December 22, 2011Applicant: ASML NETHERLANDS B.V.Inventors: Bert Jan CLAESSENS, Heine Melle MULDER, Paul VAN DER VEEN, Wilfred Edward ENDENDIJK, Willem Jan BOUMAN, Bert Pieter VAN DRIEËNHUIZEN, Jozef Ferdinand Dymphna VERBEECK, Marc Hendricus Margaretha DASSEN, Thijs Johan Henry HOLLINK
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Patent number: 7833584Abstract: Aqueous coating composition comprising a blend of 20 to 60 wt % of a multistage vinyl polymer (A) comprising 5 to 40 wt % of at least one hard polymer stage (i) having a Tg?50° C. and 95 to 60 wt % of at least one soft polymer stage (ii) having a Tg??5° C.; and 80 to 40 wt % of a vinyl oligomer-polymer (B) comprising 15 to 50 wt % of at least one alkaline soluble oligomer (iii) and 85 to 50 wt % of at least one vinyl polymer (iv) having a Tg in the range of from ?20 to 30° C.Type: GrantFiled: March 31, 2006Date of Patent: November 16, 2010Assignee: DSM IP Assets B.V.Inventors: John Geurts, Rajasingham Satgurunathan, Jan Bouman, Gerardus Cornelis Overbeek
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Publication number: 20100020300Abstract: According to an aspect of the present invention, a method of controlling a measurement apparatus for determining a property of an individually controllable element of an array of individually controllable elements, the array of individually controllable elements being capable of controlling a distribution of a beam of radiation, is disclosed. The method includes, for a sequence of a plurality of individually controllable elements: directing a measurement beam of radiation at an individually controllable element of the plurality of individually controllable elements; and detecting the measurement beam once it has been re-directed by the individually controllable element, wherein the sequence in which the method is undertaken for the plurality of individually controllable elements is related to the orientation of the plurality of individually controllable elements when the plurality of individually controllable elements are oriented to control a distribution of a beam of radiation.Type: ApplicationFiled: July 21, 2009Publication date: January 28, 2010Applicant: ASML NETHERLANDS B.V.Inventors: Willem Jan Bouman, Heine Melle Mulder, Wilfred Edward Endendijk, Rob Otte
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Patent number: 7569636Abstract: An aqueous coating composition with an improved open time comprising (a) a crosslinkable water-dispersible oligomer(s); (b) a dispersed polymer(s), (c) a pigment(s) with an oil absorption number ?25 g oil/100 g pigment and optionally (d) a Newtonian-like thickener(s) and (e) a thixotropic thickener(s) wherein the weight ratio of (a):(b) is in the range of from 10:90 to 60:40; wherein (d)+(e)=0.1 to 10 wt % and wherein said composition when drying to form a coating has a tack-free time of ?24 hours.Type: GrantFiled: March 22, 2004Date of Patent: August 4, 2009Assignee: DSM IP assets B.V.Inventors: Ronald Tennebroek, Tijs Nabuurs, Gerardus C Overbeek, Jan Bouman
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Patent number: 7532308Abstract: A uniformity controller is arranged to control a profile of a radiation intensity along the length of a target portion of a substrate so as to substantially compensate for irradiation-induced variation of the profile with respect to time. The uniformity controller includes a variable filter interposed between the illumination system and the target portion and arranged to control the relative values of the intensity applied at a series of positions within the target portion of the substrate so as to substantially compensate for variation of the profile with respect to time. In this manner the radiation intensity is controlled at a series of positions within the target portion so as to compensate for variation of the intensity profile with time.Type: GrantFiled: September 13, 2005Date of Patent: May 12, 2009Assignee: ASML Netherlands B.V.Inventor: Willem Jan Bouman
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Publication number: 20090068367Abstract: Aqueous coating composition comprising a blend of 20 to 60 wt % of a multistage vinyl polymer (A) comprising 5 to 40 wt % of at least one hard polymer stage (i) having a Tg?50° C. and 95 to 60 wt % of at least one soft polymer stage (ii) having a Tg??5° C.; and 80 to 40 wt % of a vinyl oligomer-polymer (B) comprising 15 to 50 wt % of at least one alkaline soluble oligomer (iii) and 85 to 50 wt % of at least one vinyl polymer (iv) having a Tg in the range of from ?20 to 30° C.Type: ApplicationFiled: March 31, 2006Publication date: March 12, 2009Inventors: John Geurts, Rajasingham Satgurunathan, Jan Bouman, Gerardus Cornelis Overbeek
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Publication number: 20060217483Abstract: An aqueous coating composition with an improved open time comprising (a) a crosslinkable water-dispersible oligomer(s); (b) a dispersed polymer(s), (c) a pigment(s) with an oil absorption number ?25 g oil/100 g pigment and optionally (d) a Newtonian-like thickener(s) and (e) a thixotropic thickener(s) wherein the weight ratio of (a):(b) is in the range of from 10:90 to 60:40; wherein (d)+(e)=0.1 to 10 wt % and wherein said composition when drying to form a coating has a tack-free time of ?24 hours.Type: ApplicationFiled: March 22, 2004Publication date: September 28, 2006Inventors: Ronald Tennebroek, Tijs Nabuurs, Gerardus Overbeek, Jan Bouman
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Patent number: 7049352Abstract: Pigmented aqueous coating composition providing good blocking and elasticity properties comprises a blend of a seeded multistage polymer latex(es) having at least one soft and at least one hard polymer phases and a non-film-forming polymer latex(es), the seed polymer(s) having a Tg?10° C. lower than that of the hard polymer phase(s) and preferably having a Tg?10° C. higher than that of the soft polymer phase(s), and the multistage polymer(s) preferably having amino functionality incorporated by an imination reaction.Type: GrantFiled: September 26, 2002Date of Patent: May 23, 2006Assignee: Avecia BVInventors: Alan Jack Gould, Jan Bouman, Rajasingham Satgurunathan
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Publication number: 20040260005Abstract: Pigmented aqueous coating composition providing good blocking and elasticity properties comprises a blend of a seeded multistage polymer latex(es) having at least one soft and at least one hard polymer phases and a non-film-forming polymer latex(es), the seed polymer(s) having a Tg≧10° C. lower than that of the hard polymer phase(s) and preferably having a Tg≧10° C. higher than that of the soft polymer phase(s), and the multistage polymer(s) preferably having amino functionality incorporated by an imination reaction.Type: ApplicationFiled: February 27, 2004Publication date: December 23, 2004Inventors: Alan Jack Gould, Jan Bouman, Rajasingham Satgurunathan