Patents by Inventor Jashu Patel

Jashu Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming nitride films
    Patent number: 6929831
    Abstract: A silicon nitride film, for example, is deposited by introducing into a plasma region of a chamber a silicon containing gas, molecular nitrogen and sufficient hydrogen to dissociate the nitrogen to allow the silicon and nitrogen to react to form a silicon nitride film on a surface adjacent the plasma region. The thus deposited film may then be subjected to an activation anneal.
    Type: Grant
    Filed: September 13, 2002
    Date of Patent: August 16, 2005
    Assignee: Trikon Holdings Limited
    Inventors: Jashu Patel, Knut Beekman
  • Methods of forming nitride films
    Publication number: 20030118872
    Abstract: A silicon nitride film, for example, is deposited by introducing into a plasma region of a chamber a silicon containing gas, molecular nitrogen and sufficient hydrogen to dissociate the nitrogen to allow the silicon and nitrogen to react to form a silicon nitride film on a surface adjacent the plasma region. The thus deposited film may then be subjected to an activation anneal.
    Type: Application
    Filed: September 13, 2002
    Publication date: June 26, 2003
    Inventors: Jashu Patel, Knut Beekman
  • Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation
    Patent number: 6544858
    Abstract: A silicon-containing polymer is deposited in a recess on the surface of the substrate. The substrate is then heated to a given temperature. The surface of the substrate, heated to the given temperature and having the silicon-containing polymer deposited thereon, is subjected to gas or vapor activated by a plasma or other electromagnetic radiation which is distinct from a source of heat used to heat the substrate to the given temperature.
    Type: Grant
    Filed: August 18, 2000
    Date of Patent: April 8, 2003
    Assignee: Trikon Equipments Limited
    Inventors: Knut Beekman, Jashu Patel