Patents by Inventor Jason Michael Benz

Jason Michael Benz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for thin film laser reflectance correlation for substrate etch endpoint
    Patent number: 6716362
    Abstract: A method of etching a substrate, includes measuring a reflectance signal from a reflective material deposited on the substrate as the substrate is being etched, correlating the substrate etch rate to the reflectance signal from the reflective material, and using the etch relation between the substrate and the reflective material to determine the etch target.
    Type: Grant
    Filed: October 24, 2000
    Date of Patent: April 6, 2004
    Assignee: International Business Machines Corporation
    Inventor: Jason Michael Benz