Patents by Inventor Javier Gustavo MOREIRA

Javier Gustavo MOREIRA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sacrificial layer for platinum patterning
    Patent number: 10297497
    Abstract: In accordance with at least one embodiment of the disclosure, a method of patterning platinum on a substrate is disclosed. In an embodiment, an adhesive layer is deposited over the substrate, a sacrificial layer is deposited over the adhesive layer, and a patterned photoresist layer is formed over the sacrificial layer. Then, the sacrificial layer is patterned utilizing the photoresist layer as a mask such that at least a portion of the adhesive layer is exposed. Subsequently, the top and sidewall surfaces of the patterned sacrificial layer and the first portion of the adhesive layer are covered by a platinum layer. Finally, the sacrificial layer and a portion of the platinum layer covering the top and sidewall surfaces of the sacrificial layer are etched, thereby leaving a remaining portion of the platinum layer to form a patterned platinum layer on the substrate.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: May 21, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sebastian Meier, Helmut Rinck, Kai-Alexander Schachtschneider, Fromund Metz, Mario Schmidpeter, Javier Gustavo Moreira
  • SACRIFICIAL LAYER FOR PLATINUM PATTERNING
    Publication number: 20180204767
    Abstract: In accordance with at least one embodiment of the disclosure, a method of patterning platinum on a substrate is disclosed. In an embodiment, an adhesive layer is deposited over the substrate, a sacrificial layer is deposited over the adhesive layer, and a patterned photoresist layer is formed over the sacrificial layer. Then, the sacrificial layer is patterned utilizing the photoresist layer as a mask such that at least a portion of the adhesive layer is exposed. Subsequently, the top and sidewall surfaces of the patterned sacrificial layer and the first portion of the adhesive layer are covered by a platinum layer. Finally, the sacrificial layer and a portion of the platinum layer covering the top and sidewall surfaces of the sacrificial layer are etched, thereby leaving a remaining portion of the platinum layer to form a patterned platinum layer on the substrate.
    Type: Application
    Filed: July 24, 2017
    Publication date: July 19, 2018
    Inventors: Sebastian MEIER, Helmut RINCK, Kai-Alexander SCHACHTSCHNEIDER, Fromund METZ, Mario SCHMIDPETER, Javier Gustavo MOREIRA