Abstract: In one embodiment, a lifting apparatus in an integrated circuit fabrication system includes a sliding mechanism supporting a rotatable assembly and an actuator configured to vertically move the sliding mechanism. Among other advantages, the apparatus allows the rotatable assembly to be lifted and then rotated to allow access to interior components, for example. In one embodiment, the rotatable assembly comprises a lid of a process chamber.

Abstract: A method and apparatus for transmitting data in a packet radio communication system having data sources, destinations and intermediate repeaters. According to a packet protocol, a repeat count in the protocol is decremented each time a packet is retransmitted, until the repeat count reaches zero, at which time the packet is discarded. According to another packet protocol, a sequence index is used to prevent duplicate packets from being received by requiring that the sequence number fall within a sequence number window at each device, which is incremented each time a packet is received. The sequence number is also used to cause the retransmission of packets which are lost, at which time the sequence number windows in the devices which are affected are reset to allow transmission of the lost packet.