Patents by Inventor Jean Pierre Colinge
Jean Pierre Colinge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11276763Abstract: A semiconductor device and methods of forming the same are disclosed. The semiconductor device includes a substrate, first and second source/drain (S/D) regions, a channel between the first and second S/D regions, a gate engaging the channel, and a contact feature connecting to the first S/D region. The contact feature includes first and second contact layers. The first contact layer has a conformal cross-sectional profile and is in contact with the first S/D region on at least two sides thereof. In embodiments, the first contact layer is in direct contact with three or four sides of the first S/D region so as to increase the contact area. The first contact layer includes one of a semiconductor-metal alloy, an III-V semiconductor, and germanium.Type: GrantFiled: November 13, 2019Date of Patent: March 15, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Carlos H. Diaz, Chung-Cheng Wu, Chia-Hao Chang, Chih-Hao Wang, Jean-Pierre Colinge, Chun-Hsiung Lin, Wai-Yi Lien, Ying-Keung Leung
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Publication number: 20220077310Abstract: A method for forming a source/drain region of a transistor includes providing a substrate carrying a transistor pattern, comprising a base portion having an upper face elongated along an axis, a channel surmounting the base portion, and a spacer transversely surrounding a lateral portion of the channel, forming a protective layer on a facet of the channel, so as to prevent an oxidation of the lateral portion of the channel, forming an additional insulation portion in the base portion, by oxidation from the upper face, removing the protective layer so as to expose the facet, and forming by lateral epitaxy, the source/drain region from said facet.Type: ApplicationFiled: September 10, 2021Publication date: March 10, 2022Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Shay REBOH, Jean-Pierre COLINGE
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Patent number: 11239347Abstract: Method for making a transistor, comprising: making, on a substrate, a gate surrounded by a dielectric material; depositing a stop layer on the gate and the dielectric material; etching the stop layer in accordance with an active region pattern, forming a channel location located on the gate; etching the dielectric material located in the active region pattern, forming source and drain locations; depositing a semimetal material in the channel, source and drain locations; planarizing the semimetal material; crystallizing the semimetal material, forming the channel and the source and drain; and wherein the semimetal material of the channel is semiconductive and the semimetal material of the source and drain is electrically conductive.Type: GrantFiled: April 22, 2020Date of Patent: February 1, 2022Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Jean-Pierre Colinge, Yves Morand
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Patent number: 11239084Abstract: A semiconductor device includes a fin structure disposed over a substrate, a gate structure and a source. The fin structure includes an upper layer being exposed from an isolation insulating layer. The gate structure disposed over part of the upper layer of the fin structure. The source includes the upper layer of the fin structure not covered by the gate structure. The upper layer of the fin structure of the source is covered by a crystal semiconductor layer. The crystal semiconductor layer is covered by a silicide layer formed by Si and a first metal element. The silicide layer is covered by a first metal layer. A second metal layer made of the first metal element is disposed between the first metal layer and the isolation insulating layer.Type: GrantFiled: July 13, 2020Date of Patent: February 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jean-Pierre Colinge, Carlos H. Diaz
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Patent number: 11227800Abstract: Method for producing a JFET transistor, comprising: a) producing, on a first substrate, a stack comprising a first layer comprising a first semiconductor doped according to a first conductivity type and a second layer comprising a second semiconductor doped according to a second conductivity type, the first layer being disposed between the first substrate and the second substrate, then b) securing the stack against a second substrate such that the stack is disposed between the first substrate and the second substrate, then c) removing the first substrate, then d) etching the first layer such that a remaining portion of the first layer forms a front gate of the first JFET transistor, then e) etching the second layer such that a remaining portion of the second layer is disposed below the front gate of the first JFET transistor and forms the channel, the source and the drain of the JFET transistor.Type: GrantFiled: June 16, 2020Date of Patent: January 18, 2022Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventor: Jean-Pierre Colinge
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Publication number: 20210391326Abstract: Implementation of a device with stacked transistors comprising: a first transistor of a first type, in particular N or P, the first transistor having a channel formed in one or more first semi-conducting rods of a semi-conducting structure including semi-conducting rods disposed above each other and aligned with each other, a second transistor of a second type, in particular P or N, with a gate-surrounding gate and a channel region formed in one or more second semi-conducting rods of said semi-conducting structure and disposed above the first semi-conducting rods, the source block of the second transistor being distinct from the source and drain block of the second transistor, the drain block of the second transistor being distinct from the drain and source blocks of the second transistor.Type: ApplicationFiled: August 30, 2021Publication date: December 16, 2021Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Sylvain Barraud, Jean-Pierre Colinge, Bernard Previtali
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Patent number: 11152360Abstract: Implementation of a device with stacked transistors comprising: a first transistor of a first type, in particular N or P, the first transistor having a channel formed in one or more first semi-conducting rods of a semi-conducting structure including semi-conducting rods disposed above each other and aligned with each other, a second transistor of a second type, in particular P or N, with a gate-surrounding gate and a channel region formed in one or more second semi-conducting rods of said semi-conducting structure and disposed above the first semi-conducting rods, the source block of the second transistor being distinct from the source and drain block of the second transistor, the drain block of the second transistor being distinct from the drain and source blocks of the second transistor.Type: GrantFiled: December 20, 2019Date of Patent: October 19, 2021Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Sylvain Barraud, Jean-Pierre Colinge, Bernard Previtali
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Patent number: 11133404Abstract: A finFET device having a substrate and a fin disposed on the substrate. The fin includes a passive region, a stem region overlying the passive region, and an active region overlying the stem region. The stem region has a first width and the active region has a second width. The first width is less than the second width. The stem region and the active region also have different compositions. A gate structure is disposed on the active region.Type: GrantFiled: October 28, 2019Date of Patent: September 28, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jean-Pierre Colinge, Kuo-Cheng Ching, Zhiqiang Wu
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Publication number: 20210296266Abstract: Making a semiconductor-on-insulator substrate provided with an eddy current blocking structure (20) formed in a segment (22) doped according to doping of a first type, of doped regions (23) periodically distributed on one or more parallel rows and according to a pattern (M2) and an improved arrangement.Type: ApplicationFiled: March 12, 2021Publication date: September 23, 2021Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Jean-Pierre COLINGE, Louis HUTIN, Maxime MOULIN, Thibaud FACHE
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Patent number: 11127734Abstract: An electrostatic discharge (ESD) protection circuit includes an input terminal, a transistor, and an output terminal. The input terminal is configured to receive an input signal. The transistor includes a first source/drain region, a second source/drain region, and a drift region that has a resistance in series between the first and second source/drain regions and that is configured to attenuate an ESD voltage in the input signal. The output terminal is connected to the second source/drain region.Type: GrantFiled: November 7, 2019Date of Patent: September 21, 2021Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jean-Pierre Colinge, Ta-Pen Guo, Carlos H. Diaz
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Patent number: 11104573Abstract: A semiconductor arrangement includes a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement includes a second semiconductor column projecting from the substrate region and adjacent the first semiconductor column. The second semiconductor column is separated a first distance from the first semiconductor column along a first axis. The semiconductor arrangement includes a third semiconductor column projecting from the substrate region and adjacent the first semiconductor column. The third semiconductor column is separated a second distance from the first semiconductor column along a second axis that is substantially perpendicular to the first axis. The second distance is different than the first distance.Type: GrantFiled: May 20, 2019Date of Patent: August 31, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Jean-Pierre Colinge, Ta-Pen Guo, Chih-Hao Wang, Carlos H. Diaz
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Publication number: 20210242071Abstract: The specification relates to a method for manufacturing a structured substrate provided with a trap-rich layer whereon rests a stack consisting of an insulating layer and of a layer of single-crystal material, the method comprising the following steps: a) a step of forming an amorphous silicon layer on a front face of a silicon substrate, b) a step of heat treating intended to convert the amorphous silicon layer into a trap-rich layer made of single-crystal silicon grains, the heat treatment conditions in terms of duration and of temperature being adjusted to limit the grains to a size less than 200 nm, c) a step of forming a stack by overlapping the trap-rich layer, and consisting of an insulating layer and of a layer of single-crystal material.Type: ApplicationFiled: February 3, 2021Publication date: August 5, 2021Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventor: Jean-Pierre COLINGE
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Patent number: 11043597Abstract: Semiconductor structures and methods reduce contact resistance, while retaining cost effectiveness for integration into the process flow by introducing a heavily-doped contact layer disposed between two adjacent layers. The heavily-doped contact layer may be formed through a solid-phase epitaxial regrowth method. The contact resistance may be tuned by adjusting dopant concentration and contact area configuration of the heavily-doped epitaxial contact layer.Type: GrantFiled: October 8, 2019Date of Patent: June 22, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jean-Pierre Colinge, Carlos H. Diaz
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Patent number: 11038052Abstract: A semiconductor arrangement comprises a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement comprises a second semiconductor column projecting from the substrate region. The second semiconductor column is separated a first distance from the first semiconductor column. The first distance is between about 10 nm to about 30 nm.Type: GrantFiled: May 13, 2019Date of Patent: June 15, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Jean-Pierre Colinge, Kuo-Cheng Ching, Ta-Pen Guo, Carlos H. Diaz
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Publication number: 20210159012Abstract: An electronic device includes a substrate; a porous semiconductor material layer arranged on the substrate; a first high magnetic permeability material arranged inside the pores of a first portion of the porous semiconductor layer, the first portion of the porous semiconductor material layer impregnated with the first high magnetic permeability material forming a first magnetic layer separated from the substrate by a second portion of the porous semiconductor material layer; and a coil arranged on the first magnetic layer.Type: ApplicationFiled: November 23, 2020Publication date: May 27, 2021Inventor: Jean-Pierre COLINGE
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Patent number: 10985159Abstract: A method for manufacturing a monolithic three-dimensional (3D) integrated circuit (IC) with junctionless semiconductor devices (JSDs) is provided. A first interlayer dielectric (ILD) layer is formed over a semiconductor substrate, while also forming first vias and first interconnect wires alternatingly stacked in the first ILD layer. A first doping-type layer and a second doping-type layer are transferred to a top surface of the first ILD layer. The first and second doping-type layers are stacked and are semiconductor materials with opposite doping types. The first and second doping-type layers are patterned to form a first doping-type wire and a second doping-type wire overlying the first doping-type wire. A gate electrode is formed straddling the first and second doping-type wires. The gate electrode and the first and second doping-type wires at least partially define a JSD.Type: GrantFiled: November 27, 2019Date of Patent: April 20, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jean-Pierre Colinge, Carlos H. Diaz, Ta-Pen Guo
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Publication number: 20210104618Abstract: According to another embodiment, a method of forming a transistor is provided. The method includes the following operations: providing a substrate; providing a source over the substrate; providing a channel connected to the source; providing a drain connected to the channel; providing a gate insulator adjacent to the channel; providing a gate adjacent to the gate insulator; providing a first interlayer dielectric between the source and the gate; and providing a second interlayer dielectric between the drain and the gate, wherein at least one of the formation of the source, the drain, and the channel includes about 20-95 atomic percent of Sn.Type: ApplicationFiled: November 30, 2020Publication date: April 8, 2021Inventors: Jean-Pierre Colinge, Carlos H. Diaz
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Patent number: 10964691Abstract: A method for manufacturing a monolithic three-dimensional (3D) integrated circuit (IC) with junctionless semiconductor devices (JSDs) is provided. A first interlayer dielectric (ILD) layer is formed over a semiconductor substrate, while also forming first vias and first interconnect wires alternatingly stacked in the first ILD layer. A first doping-type layer and a second doping-type layer are transferred to a top surface of the first ILD layer. The first and second doping-type layers are stacked and are semiconductor materials with opposite doping types. The first and second doping-type layers are patterned to form a first doping-type wire and a second doping-type wire overlying the first doping-type wire. A gate electrode is formed straddling the first and second doping-type wires. The gate electrode and the first and second doping-type wires at least partially define a JSD.Type: GrantFiled: September 4, 2019Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jean-Pierre Colinge, Carlos H. Diaz, Ta-Pen Guo
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Patent number: 10943833Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. For example, one or more silicon and silicon germanium stacks are utilized to form PMOS transistors comprising germanium nanowire channels and NMOS transistors comprising silicon nanowire channels. In an example, a first silicon and silicon germanium stack is oxidized to transform silicon to silicon oxide regions, which are removed to form germanium nanowire channels for PMOS transistors. In another example, silicon and germanium layers within a second silicon and silicon germanium stack are removed to form silicon nanowire channels for NMOS transistors. PMOS transistors having germanium nanowire channels and NMOS transistors having silicon nanowire channels are formed as part of a single fabrication process.Type: GrantFiled: October 11, 2019Date of Patent: March 9, 2021Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Kuo-Cheng Chiang, Carlos H. Diaz, Jean-Pierre Colinge
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Publication number: 20210043756Abstract: Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.Type: ApplicationFiled: October 26, 2020Publication date: February 11, 2021Inventors: Jean-Pierre Colinge, Carlos H. Diaz, Yee-Chia Yeo