Patents by Inventor Jean R. Vatus

Jean R. Vatus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of calibrating and using a semiconductor processing system
    Publication number: 20030151733
    Abstract: A method is provided wherein a temperature reading error of a pyrometer is avoided. An upper pyrometer is used to detect infrared radiation from a test layer formed on a test substrate under standard processing conditions. The infrared radiation from the test layer has a period having a length which is indicative of growth rate of the layer. The period is generally inversely proportional to the growth rate. The growth rate is directly related to the temperature.
    Type: Application
    Filed: February 13, 2002
    Publication date: August 14, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Jean R. Vatus, David K. Carlson, Arkadii V. Samoilov, Lance A. Scudder, Paul B. Comita, Annie A. Karpati