Abstract: A vacuum processing system has one or more wafer handler with an end effector that, starting at its fixed end, tapers inwardly to form side recesses on opposing sides of the end effector and then tapers outwardly to a free end that is wider than the fixed end. At its free end, the end effector has another recess defining a pair of fingers with wafer supports thereon. The free end recess extends into the wafer sense cutout area. The pair of fingers providing the wafer supports at the free end of the end effector are spaced wider than the innermost exclusion zones for a standard 300 mm wafer carrier, but closer together than the outermost exclusion zones. In one embodiment, the end effector has a three-point ball, or bump, support for the wafer.

Abstract: A high voltage feed through supplies power to a device through a passage in a wall of a vacuum chamber. The feed through includes a ceramic body comprising a first brazing surface, a second brazing surface, and a central passage for a conductor, a power source connector brazed to the first brazing surface, and a mounting flange brazed to the second brazing surface, wherein the first and second brazing surfaces are positioned to reduce tensile forces on brazed connections. The brazing surfaces are preferably coplanar to reduce the tensile forces, or angled to place residual compressive forces on the brazed connections. The tensile forces on co-planar surfaces are further reduced by brazing ceramic rings to the power source connector and the mounting flange opposite brazed connections to the ceramic body of the feed through.

Abstract: An apparatus for lifting an object in a sealed chamber and transferring an object from a robot to an operating member has a pair of concentrically mounted support members. A lower support member positioned within the chamber extends through an opening in the chamber is adapted to lift a wafer from a robot. A motion actuator positioned outside the chamber and attached to the lower support member is adapted to move the lower support member axially. An upper support member positioned within the chamber above the lower support member extends through an axial passageway in the lower support member to a position external the chamber and below the lower support member. A separate motion actuator positioned outside the chamber and attached to the upper support member is adapted to move the upper support member axially. A flexible vacuum bellows positioned in the chamber and between the upper support member, the lower support member, and the chamber provides a seal therebetween.