Abstract: A semiconductor processing system includes a first component forming a first chamber. A first sealed environment in the first chamber is at a first state prior to a door being opened. A load port structure is disposed between the first component and a second component. The load port structure includes walls disposed around an opening of the load port structure. The load port structure is separate from the first component and the second component. A third component is configured to change at least one of the first state of the first sealed environment within the first chamber or a second state of a second sealed environment within a second chamber formed by the second component to cause the first state and the second state to be substantially similar before the door between the first sealed environment and the second sealed environment is opened.

Abstract: A soft drink dispenser capable of rapidly dispensing carbonated beverages with minimized foaming action. The syrup and soda are dispensed separate from each other and allowed to mix upon the ice in a cup placed beneath the dispensing head. The dispensing of the syrup and soda is staged to minimize foaming while achieving optimum beverage taste. Syrup is dispensed from individual pumps which communicate with a bulk supply. The syrup is consolidated in the pumps, preventing waste or the introduction of "slugs" into the dispensing line. The temperature of the syrup is monitored and compensation is made during the dispensing cycle to accommodate changes in viscosity. In generating soda, water is precooled and then introduced into an insulated tank where it is subjected to pressurized carbon dioxide. In the pour head, a cluster of soda orifices are peripherally encompassed by syrup orifices, certain of which are angled to cause the syrup to convolute the stream of soda.