Abstract: A heat exchanger may comprise a primary fluid path comprising an outer shell enclosing a primary cavity through which a primary fluid may flow; and a secondary fluid path coupled to the primary fluid path comprising a secondary fluid supply conduit, a secondary fluid exit conduit, and a first heat transfer element coupled fluidly between the secondary fluid supply conduit and the secondary fluid exit conduit, wherein the secondary fluid path is configured such that a secondary fluid may flow through the secondary fluid supply conduit, the first heat transfer element, and the secondary fluid exit conduit, which are in fluid communication with one another. The first heat transfer element, and additional heat transfer elements, may be disposed in the primary cavity such that the primary fluid contacts a secondary outer shell of the first heat transfer element.

Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.

Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.

Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.

Abstract: A whirlpool reduction cap. The cap for redirecting fluid flow towards an exit port or drain in a vessel comprises a top solid surface area greater than or equal to the area of the exit port, a base connected to the exit port, a side wall positioned between the top surface and the exit port, and an inlet positioned in the side wall, thereby reducing formation of a vortex as a fluid is drained from the vessel.

Abstract: An apparatus and method for homogeneous mixing and delivery of a solution, such as a colloidal suspension, the apparatus comprising a holding vessel for holding a solution body, a jet mixing device situated coplanar with a solution level in the holding vessel, the jet mixing device having a plurality of jets having tangential outlets positioned to discharge a stream of solution against interior walls of the holding vessel at a ballistic angle .THETA..sub.2 in relation to a solution level in the holding vessel thereby creating a helical flow in said solution body. The apparatus may also include a whirlpool reduction cap and flow diverters.