Abstract: A mass flow device comprises an inlet and an outlet; a bypass and a laminar flow element disposed within the bypass. The device also includes a sensor constructed so as to provide an output signal representative of the flow rate through the mass flow device, the sensor including a tube in fluid communication with the inlet and the laminar flow element at an upstream connection location, and the outlet and the laminar flow element at a downstream connection location. A flow equalizer is disposed between the inlet and the upstream connection location, wherein the flow equalizer includes a porous medium constructed with an interconnected porosity so as to greatly reduce the flow disturbance to the sensor with an approximate equalized flow pattern exiting the equalizer.

Abstract: A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall defines an orifice providing fluid communication with the port of the body. A valve member is received in the orifice member and is movable along an axis with respect to the orifice, and a flat spring is secured to the side wall of the orifice member and has arms secured to the valve member. A valve seat is secured to the end wall and defines an opening over the orifice, and a plug is secured to an end of the valve member opposite the valve seat such that, when the valve member is moved along the axis towards the orifice, the plug contacts the seat to seal the opening.