Patents by Inventor Jeffrey Dietz

Jeffrey Dietz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
    Publication number: 20070256785
    Abstract: Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.
    Type: Application
    Filed: May 3, 2006
    Publication date: November 8, 2007
    Inventors: Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly McDonough, Jivko Dinev, Farid Abooameri, David Gutierrez, Jim He, Robert Clark, Dennis Koosau, Jeffrey Dietz, Declan Scanlan, Subhash Deshmukh, John Holland, Alexander Paterson
  • APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
    Publication number: 20070256786
    Abstract: Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.
    Type: Application
    Filed: May 31, 2006
    Publication date: November 8, 2007
    Inventors: Xiaoping Zhou, Jeffrey Dietz