Patents by Inventor Jeffrey Hendrikus Peter Maria Goossens

Jeffrey Hendrikus Peter Maria Goossens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
    Patent number: 8452442
    Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
    Type: Grant
    Filed: February 8, 2012
    Date of Patent: May 28, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens
  • CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE
    Publication number: 20120143367
    Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
    Type: Application
    Filed: February 8, 2012
    Publication date: June 7, 2012
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marcel Francois HEERTJES, Wilhelmus Franciscus Johanne SIMONS, Dennis, Andreas Petrus Hubertina HOUBEN, Jeffrey Hendrikus Peter Maria GOOSSENS
  • Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
    Patent number: 8135488
    Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
    Type: Grant
    Filed: December 10, 2008
    Date of Patent: March 13, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens
  • CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE
    Publication number: 20090244767
    Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
    Type: Application
    Filed: December 10, 2008
    Publication date: October 1, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Marcel Francois Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina, Houben, Jeffrey Hendrikus Peter Maria Goossens