Patents by Inventor Jeffrey L. Hurd, deceased

Jeffrey L. Hurd, deceased has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process of controlling grain growth in metal films
    Patent number: 6126761
    Abstract: A process for controlling grain growth in the microstructure of thin metal films (e.g., copper or gold) deposited onto a substrate. In one embodiment, the metal film is deposited onto the substrate to form a film having a fine-grained microstructure. The film is heated in a temperature range of 70-100.degree. C. for at least five minutes, wherein the fine-grained microstructure is converted into a stable large-grained microstructure. In another embodiment, the plated film is stored, after the step of depositing, at a temperature not greater than -20.degree. C., wherein the fine-grained microstructure is stabilized without grain growth for the entire storage period.
    Type: Grant
    Filed: June 10, 1998
    Date of Patent: October 3, 2000
    Assignee: International Business Machines Corporation
    Inventors: Patrick W. DeHaven, Charles C. Goldsmith, Jeffrey L. Hurd, deceased, Suryanarayana Kaja, Michele S. Legere, Eric D. Perfecto