Patents by Inventor Jeffrey Ned Miller

Jeffrey Ned Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical vapor deposition of metals on a spherical shaped semiconductor substrate
    Patent number: 6328804
    Abstract: A method and system for chemical vapor deposition (MO CVD) of a metal layer upon a spherical substrate at atmospheric pressure are disclosed. The method performs chemical vapor deposition of a metal layer such as aluminum or copper upon the semiconductor spherical substrate by using a reactor made of a material such as quartz. The semiconductor spherical substrate moves and spins through the reactor where it is heated by a frequency heater such as an infrared heater. The heater utilizes infrared power source operating at a wavelength between 1 and 3 microns where the power is substantially absorbed by the semiconductor spherical substrate and is substantially transmitted by the quartz.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: December 11, 2001
    Assignee: Ball Semiconductor, Inc.
    Inventors: Ivan Herman Murzin, Jeffrey Ned Miller, Ajay Tapiawala