Patents by Inventor Jeffrey R. Stack

Jeffrey R. Stack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Curved grooving of polishing pads
    Patent number: 7234224
    Abstract: A method is provided for forming grooves in a polishing pad useful for planarizing a substrate in a chemical mechanical planarization process. The method maintains average velocity as a function of bit diameter to enable groove formation using a rotating bit, whereby grooves can be formed at a higher rate while maintaining high groove quality and low defectivity.
    Type: Grant
    Filed: November 3, 2006
    Date of Patent: June 26, 2007
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Steven Naugler, Steven J. Pufka, Jeffrey R. Stack, Weitung Wang