Patents by Inventor Jeffrey W. Fish

Jeffrey W. Fish has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitive manometer having reduced process drift
    Patent number: 6901808
    Abstract: A capacitive manometer includes a flow passage through which gas can enter the manometer, a deflectable diaphragm, and a filter arranged in the flow passage. The filter is capable of removing condensable vapors from the gas so that the condensable vapors do not reach and deposit on the diaphragm. The capacitive manometer can include a cooling unit arranged to cool the filter so as to enhance removal of condensable vapors from the gas by the filter. The capacitive manometer can include a baffle having gas passages distributed to control distribution of condensable vapors, which pass through the baffle, on the diaphragm.
    Type: Grant
    Filed: February 11, 2003
    Date of Patent: June 7, 2005
    Assignee: Lam Research Corporation
    Inventors: Leonard J. Sharpless, Neil Benjamin, Jeffrey W. Fish