Abstract: A system includes a rack of servers and a fluid circuit for cooling the rack of servers. The fluid circuit includes one or more cooling modules, a heat-exchanging module, and a pump. The one or more cooling modules are thermally connected to a conduit for flowing a coolant therethrough. Each cooling module includes a heat-exchanger thermally connected to the conduit and a chiller fluidly coupled to the heat-exchanger. The heat-exchanging module is fluidly connected to an outlet of the conduit. The pump is configured to drive the coolant from the heat-exchanging module to each server in the rack of servers.

Abstract: A system includes a rack of servers and a fluid circuit for cooling the rack of servers. The fluid circuit includes one or more cooling modules, a heat-exchanging module, and a pump. The one or more cooling modules are thermally connected to a conduit for flowing a coolant therethrough. Each cooling module includes a heat-exchanger thermally connected to the conduit and a chiller fluidly coupled to the heat-exchanger. The heat-exchanging module is fluidly connected to an outlet of the conduit. The pump is configured to drive the coolant from the heat-exchanging module to each server in the rack of servers.

Abstract: A method of fabricating an interconnect structure is described. A substrate is provided. A patterned interfacial metallic layer is formed on the substrate. An amorphous carbon insulating layer or a carbon-based insulating layer is formed covering the substrate and the interfacial metallic layer. A conductive carbon line or plug is formed in the amorphous carbon or carbon-based insulating layer electrically connected with the interfacial metallic layer. An interconnect structure is also described, including a substrate, a patterned interfacial metallic layer on the substrate, an amorphous carbon insulating layer or a carbon-based insulating layer on the substrate, and a conductive carbon line or plug disposed in the amorphous carbon or carbon-based insulating layer and electrically connected with the interfacial metallic layer.

Abstract: A method of fabricating an interconnect structure is described. A substrate is provided. A patterned interfacial metallic layer is formed on the substrate. An amorphous carbon insulating layer or a carbon-based insulating layer is formed covering the substrate and the interfacial metallic layer. A conductive carbon line or plug is formed in the amorphous carbon or carbon-based insulating layer electrically connected with the interfacial metallic layer. An interconnect structure is also described, including a substrate, a patterned interfacial metallic layer on the substrate, an amorphous carbon insulating layer or a carbon-based insulating layer on the substrate, and a conductive carbon line or plug disposed in the amorphous carbon or carbon-based insulating layer and electrically connected with the interfacial metallic layer.

Abstract: A method for manufacturing a metal-oxide semiconductor (MOS) transistor includes providing a substrate having at least a gate structure and a shallow trench isolation (STI) formed thereon, performing a first etching process to form recesses in the substrate respectively at two sides of the gate structure, performing a selective epitaxial growth (SEG) process to form epitaxial silicon layers in the recesses respectively, accordingly a seam is formed in between the epitaxial silicon layer and the STI, forming a dielectric layer in the seam, and performing a self-aligned silicide (salicide) process.

Abstract: A metal-oxide semiconductor (MOS) transistor includes a gate structure positioned in an active area defined in a substrate, a recessed source/drain, and an asymmetric shallow trench isolation (STI) for electrically isolating the active areas. A surface of the asymmetric STI and the substrate is coplanar.

Abstract: A method for manufacturing a metal-oxide semiconductor (MOS) transistor includes providing a substrate having at least a gate structure and a shallow trench isolation (STI) formed thereon, performing a first etching process to form recesses in the substrate respectively at two sides of the gate structure, performing a selective epitaxial growth (SEG) process to form epitaxial silicon layers in the recesses respectively, accordingly a seam is formed in between the epitaxial silicon layer and the STI, forming a dielectric layer in the seam, and performing a self-aligned silicide (salicide) process.

Abstract: At least one gate electrode is formed on a substrate. A first dielectric layer and a second dielectric layer are formed on the gate electrode, respectively. A portion of the second dielectric layer is removed to form a spacer on either side of the gate electrode. A portion of the first dielectric layer is removed to form a notch between the gate electrode and the spacer, the notch having an aspect ratio greater than 1. A self-aligned silicide process is performed to form a silicide on exposed surfaces of the gate electrode and the first dielectric layer underneath the notch.

Abstract: At least one gate electrode is formed on a substrate. A first dielectric layer and a second dielectric layer are formed on the gate electrode, respectively. A portion of the second dielectric layer is removed to form a spacer on either side of the gate electrode. A portion of the first dielectric layer is removed to form a notch between the gate electrode and the spacer, the notch having an aspect ratio greater than 1. A self-aligned silicide process is performed to form a silicide on exposed surfaces of the gate electrode and the first dielectric layer underneath the notch.