Patents by Inventor Jennifer Fangli Hao

Jennifer Fangli Hao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polar regions for electrostatic de-chucking with lift pins
    Patent number: 8840754
    Abstract: An apparatus for electrostatic chucking and dechucking of a semiconductor wafer includes an electrostatic chuck with a number of zones. Each zone includes one or more polar regions around a lift pin that contacts a bottom surface of the semiconductor wafer. The apparatus also includes one or more controllers that control the lift pins and one or more controllers that control the polar regions. The controller for the lift pins receives data from one or more sensors and uses the data to adjust the upward force of the lift pins. Likewise, the controller for the polar regions receives data from the sensors and uses the data to adjust the voltage in the polar regions.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: September 23, 2014
    Assignee: Lam Research Corporation
    Inventor: Jennifer Fangli Hao
  • POLAR REGIONS FOR ELECTROSTATIC DE-CHUCKING WITH LIFT PINS
    Publication number: 20120070996
    Abstract: An apparatus for electrostatic chucking and dechucking of a semiconductor wafer includes an electrostatic chuck with a number of zones. Each zone includes one or more polar regions around a lift pin that contacts a bottom surface of the semiconductor wafer. The apparatus also includes one or more controllers that control the lift pins and one or more controllers that control the polar regions. The controller for the lift pins receives data from one or more sensors and uses the data to adjust the upward force of the lift pins. Likewise, the controller for the polar regions receives data from the sensors and uses the data to adjust the voltage in the polar regions.
    Type: Application
    Filed: December 16, 2010
    Publication date: March 22, 2012
    Inventor: Jennifer Fangli Hao