Patents by Inventor Jennifer Shan

Jennifer Shan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Doped tantalum nitride for copper barrier applications
    Patent number: 10784157
    Abstract: Described are doped TaN films, as well as methods for providing the doped TaN films. Doping TaN films with Ru, Cu, Co, Mn, Al, Mg, Cr, Nb, Ti and/or V allows for enhanced copper barrier properties of the TaN films. Also described are methods of providing films with a first layer comprising doped TaN and a second layer comprising one or more of Ru and Co, with optional doping of the second layer.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: September 22, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Annamalai Lakshmanan, Paul F. Ma, Mei Chang, Jennifer Shan
  • Doped Tantalum Nitride for Copper Barrier Applications
    Publication number: 20130140698
    Abstract: Described are doped TaN films, as well as methods for providing the doped TaN films. Doping TaN films with Ru, Cu, Co, Mn, Al, Mg, Cr, Nb, Ti and/or V allows for enhanced copper barrier properties of the TaN films. Also described are methods of providing films with a first layer comprising doped TaN and a second layer comprising one or more of Ru and Co, with optional doping of the second layer.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 6, 2013
    Inventors: Annamalai Lakshmanan, Paul F. Ma, Mei Chang, Jennifer Shan
  • Method Of Processing Low K Dielectric Films
    Publication number: 20120122320
    Abstract: Provided are methods for re-incorporating carbon into low-k films after processes which result in depletion of carbon from the films. Additionally, methods for replenished depleted carbon and capping with tantalum nitride are also described.
    Type: Application
    Filed: November 15, 2011
    Publication date: May 17, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Annamalai Lakshmanan, Zhenjiang Cui, Mehul Naik, See-Eng Phan, Jennifer Shan, Paul F. Ma