Patents by Inventor Jens Fittkau
Jens Fittkau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220390840Abstract: A light-enhanced wafer processing system disclosed herein which includes a rotatable chuck configured to support and selectively rotate at least one wafer, at least one dispenser body configured to selectively flow at least one photolytic material onto a surface of the wafer, and at least one optical radiation source may be configured to provide optical radiation to at least a portion of the wafer having photolytic material applied thereto, wherein the optical radiation is configured to result in the formation of optically-induced radicals having enhanced reactivity with at least one material applied to the wafer.Type: ApplicationFiled: June 1, 2022Publication date: December 8, 2022Inventors: Jens Fittkau, Christiane Le Tiec, Curt Rettig, Dirk Nolte, Kay Mittler, Carsten Becher
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Patent number: 8339607Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: GrantFiled: May 27, 2011Date of Patent: December 25, 2012Assignee: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Patent number: 8085401Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: GrantFiled: March 3, 2009Date of Patent: December 27, 2011Assignee: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20110228274Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: ApplicationFiled: May 27, 2011Publication date: September 22, 2011Applicant: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20100027017Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: ApplicationFiled: March 3, 2009Publication date: February 4, 2010Applicant: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Patent number: 7622037Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: GrantFiled: August 7, 2007Date of Patent: November 24, 2009Assignee: MKS Instruments, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Patent number: 7502114Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: GrantFiled: March 12, 2004Date of Patent: March 10, 2009Assignee: MKS Instruments, Inc.Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20080002518Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: ApplicationFiled: August 7, 2007Publication date: January 3, 2008Applicant: MKS Instruments, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Patent number: 7264006Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: GrantFiled: August 19, 2005Date of Patent: September 4, 2007Assignee: MKS Instruments, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Publication number: 20060107969Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: ApplicationFiled: August 19, 2005Publication date: May 25, 2006Applicant: MKS Instruments, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Patent number: 6948504Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: GrantFiled: September 10, 2004Date of Patent: September 27, 2005Assignee: MKS Instruments, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Publication number: 20050200848Abstract: An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.Type: ApplicationFiled: March 12, 2004Publication date: September 15, 2005Inventors: Stephan Levine, Johannes Seiwert, Joachim Lohr, Ulrich Brammer, Jens Fittkau
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Publication number: 20050029202Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: ApplicationFiled: September 10, 2004Publication date: February 10, 2005Applicant: Applied Science and Technology, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Patent number: 6805791Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: GrantFiled: April 26, 2002Date of Patent: October 19, 2004Assignee: Applied Science and Technology, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Publication number: 20030164338Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.Type: ApplicationFiled: April 26, 2002Publication date: September 4, 2003Applicant: Applied Science & Technology, Inc.Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk