Patents by Inventor Jens Oberrath

Jens Oberrath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9113543
    Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: August 18, 2015
    Assignee: RUHR-UNIVERSITÄT BOCHUM
    Inventors: Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz
  • Publication number: 20130160523
    Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.
    Type: Application
    Filed: October 6, 2011
    Publication date: June 27, 2013
    Applicant: RUHR-UNIVERSITÄT BOCHUM
    Inventors: Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz