Patents by Inventor Jeong-su Ha

Jeong-su Ha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10724967
    Abstract: An inspection apparatus for a semiconductor process and a semiconductor process device, the inspection apparatus including a transferer configured to transfer a process object between a plurality of chambers; at least one line camera installed above the transferer, the at least one line camera being configured to generate an original image by capturing an image of the process object transferred by the transferer; and a controller configured to receive the original image and to perform an inspection of the process object by correcting distortion of the original image due to a change in transfer speed of the transferer.
    Type: Grant
    Filed: January 8, 2019
    Date of Patent: July 28, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myung Ho Jung, Young Su Ryu, Sung Chai Kim, Jong Su Kim, Won Guk Seo, Chang Hoon Choi, Jeong Su Ha
  • Publication number: 20190323973
    Abstract: An inspection apparatus for a semiconductor process and a semiconductor process device, the inspection apparatus including a transferer configured to transfer a process object between a plurality of chambers; at least one line camera installed above the transferer, the at least one line camera being configured to generate an original image by capturing an image of the process object transferred by the transferer; and a controller configured to receive the original image and to perform an inspection of the process object by correcting distortion of the original image due to a change in transfer speed of the transferer.
    Type: Application
    Filed: January 8, 2019
    Publication date: October 24, 2019
    Inventors: Myung Ho JUNG, Young Su RYU, Sung Chai KIM, Jong Su KIM, Won Guk SEO, Chang Hoon CHOI, Jeong Su HA
  • Patent number: 10199282
    Abstract: Disclosed are an inspection apparatus and a method of manufacturing a semiconductor device using the same. The inspection apparatus includes a stage configured to receive a substrate, an objective lens on the stage and configured to enlarge the substrate optically, an ocular lens on the objective lens and configured to form at its image plane an image of the substrate, and a plurality of sensors above the ocular lens and in the image plane of the ocular lens.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: February 5, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Won Park, Jeong-Su Ha, Sangbong Park, Kwang Soo Kim, Byeong Kyu Cha
  • Publication number: 20180144998
    Abstract: Disclosed are an inspection apparatus and a method of manufacturing a semiconductor device using the same. The inspection apparatus includes a stage configured to receive a substrate, an objective lens on the stage and configured to enlarge the substrate optically, an ocular lens on the objective lens and configured to form at its image plane an image of the substrate, and a plurality of sensors above the ocular lens and in the image plane of the ocular lens.
    Type: Application
    Filed: June 19, 2017
    Publication date: May 24, 2018
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Sung-Won PARK, Jeong-Su HA, Sangbong PARK, Kwang Soo KIM, Byeong Kyu CHA
  • Patent number: 7488936
    Abstract: A TFT array inspecting apparatus inspects a TFT array disposed at either an inclined position and a level position. The TFT array inspecting apparatus includes a vacuum chamber, a stage disposed in the vacuum chamber so that a TFT array to be inspected is disposed on the stage, an electron gun disposed opposite to the stage in the vacuum chamber to generate an electron beam onto the TFT array, an electron detecting unit to detect secondary electrons emitted from the TFT array by the electron gun, and at least one elevating unit to move the TFT array move between a level position and an inclined position having a designated angle with the level position.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: February 10, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho Seok Choi, Vasily Lenyashine, Hyeong Min Ahn, Jeong Su Ha, Sergey Antonov, Mi Jeong Song
  • Patent number: 7362123
    Abstract: An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of reference patterns corresponding to the pixels, a power supply to supply power to both a predetermined number of the pixels and the corresponding reference pattern to form an electric field in a space between the TFT substrate and the reference substrate, an electron beam emitter to emit an electron beam to travel from a first side to a second side of the space, an electron beam detector to detect the electron beam emitted from the electron beam emitter and passed through the space, and a controller to determine whether the TFT substrate includes a defective pixel based on a location of the electron beam detected by the electron beam detector. Thus, the inspection apparatus can correctly and quickly inspect the TFT substrate for defects in a low vacuum state regardless a size of the TFT substrate.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: April 22, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-seok Choi, Sergey Antonov, Hyeong-min Ahn, Jeong-su Ha, Lemjachine Vassili, Mi-jeong Song
  • Publication number: 20060186335
    Abstract: An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of reference patterns corresponding to the pixels, a power supply to supply power to both a predetermined number of the pixels and the corresponding reference pattern to form an electric field in a space between the TFT substrate and the reference substrate, an electron beam emitter to emit an electron beam to travel from a first side to a second side of the space, an electron beam detector to detect the electron beam emitted from the electron beam emitter and passed through the space, and a controller to determine whether the TFT substrate includes a defective pixel based on a location of the electron beam detected by the electron beam detector. Thus, the inspection apparatus can correctly and quickly inspect the TFT substrate for defects in a low vacuum state regardless a size of the TFT substrate.
    Type: Application
    Filed: January 10, 2006
    Publication date: August 24, 2006
    Inventors: Ho-seok Choi, Sergey Antonov, Hyeong-min Ahn, Jeong-su Ha, Lemiachine Vassili, Mi-jeong Song