Abstract: A substrate inspection apparatus inspecting substrates using a vision system, which includes a camera module and an illumination module, and a substrate treatment system including the substrate inspection apparatus are provided. The substrate treatment system includes: a first substrate treatment apparatus; a second substrate treatment apparatus; a transfer unit transporting a container with a plurality of substrates accommodated therein from the first substrate treatment apparatus to the second substrate treatment apparatus; and a substrate inspection apparatus inspecting the substrates, wherein the substrate inspection apparatus includes an illumination module, which illuminates in a direction where the substrates are located, a camera module, which acquires images related to the substrates when the substrates are illuminated, and a control module, which inspects the substrates based on the images.

Abstract: A semiconductor device capable of improving a device performance and a reliability is provided. The semiconductor device comprising a gate structure including a gate electrode on a substrate, a source/drain pattern on a side face of the gate electrode, on the substrate and, a source/drain contact connected to the source/drain pattern, on the source/drain pattern, a gate contact connected to the gate electrode, on the gate electrode, and a wiring structure connected to the source/drain contact and the gate contact, on the source/drain contact and the gate contact, wherein the wiring structure includes a first via plug, a second via plug, and a wiring line connected to the first via plug and the second via plug, the first via plug has a single conductive film structure, and the second via plug includes a lower via filling film, and an upper via filling film on the lower via filling film.

Abstract: Disclosed is a customer relationship management system and operation method thereof that enables a technician to seize the customer's satisfaction and sensitivity with respect to respective service providers, perform reception of the corresponding customer based on the seized information, register the seized information in a database, and perform a service using a proper reception for the corresponding customer after confirming the sensitivity of the customer. According to the customer relationship management system and operation method, the customer can directly select the technician, and thus remove the uneasy feeling caused by a strange visitor. Also, by confirming again the customer's satisfaction with the service after completion of the service providing, the reliability of the service with respect to the customer is improved.

Abstract: Disclosed is a customer relationship management system and operation method thereof that enables a technician to seize the customer's satisfaction and sensitivity with respect to respective service providers, perform reception of the corresponding customer based on the seized information, register the seized information in a database, and perform a service using a proper reception for the corresponding customer after confirming the sensitivity of the customer. According to the customer relationship management system and operation method, the customer can directly select the technician, and thus remove the uneasy feeling caused by a strange visitor. Also, by confirming again the customer's satisfaction with the service after completion of the service providing, the reliability of the service with respect to the customer is improved.