Patents by Inventor Jeonghyun Hwang
Jeonghyun Hwang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240099496Abstract: Disclosed herein are a water supply device, and a steam supply device and a cooking appliance comprising the same. The water supply device comprises a slider being accommodated in a housing the front surface of which is open, in a way that the slider is movable in a front-rear direction, and a water tank being installed in the housing in a way that the water tank comes in and out of the housing in the front-rear direction and connecting to the slider to move forward together with the slider, and the slider is provided apart from the water tank.Type: ApplicationFiled: September 19, 2023Publication date: March 28, 2024Inventors: Jangmo SHIN, Jeonghyun Lee, Hansaem Hwang, Janghoon Kim, Chan-Yong Yeo
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Patent number: 11916119Abstract: Disclosed are embodiments of a transistor (e.g., a III-V high electron mobility transistor (HEMT), a III-V metal-insulator-semiconductor HEMT (MISHEMT), or the like) that has multiple self-aligned terminals. The self-aligned terminals include a self-aligned gate, a self-aligned source terminal and, optionally, a self-aligned drain terminal. By forming self-aligned terminals during processing, the separation distances between the terminals (e.g., between the gate and source terminal and, optionally, between the gate and drain terminal) can be reduced in order to reduce device size and to improve performance (e.g., to reduce on resistance and increase switching speeds). Also disclosed herein are method embodiments for forming such a transistor.Type: GrantFiled: November 3, 2021Date of Patent: February 27, 2024Assignee: GlobalFoundries U.S. Inc.Inventors: Zhong-Xiang He, Jeonghyun Hwang, Ramsey M. Hazbun, Brett T. Cucci, Ajay Raman, Johnatan A. Kantarovsky
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Patent number: 11881506Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The structure includes: a gate structure comprising a horizontal portion and a substantially vertical stem portion; and an air gap surrounding the substantially vertical stem portion and having a curved surface under the horizontal portion.Type: GrantFiled: July 27, 2021Date of Patent: January 23, 2024Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Brett T. Cucci, Jeonghyun Hwang, Siva P. Adusumilli
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Publication number: 20240006524Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a patterned buried porous layer of semiconductor material and a device over the patterned buried porous layer, and methods of manufacture. The structure includes: a semiconductor substrate includes a patterned buried porous layer within the semiconductor substrate; a semiconductor compound material over the semiconductor substrate and the patterned buried porous layer; and at least one device on the semiconductor compound material. The non-patterned portions of the semiconductor substrate provide a thermal pathway within the semiconductor substrate.Type: ApplicationFiled: June 29, 2022Publication date: January 4, 2024Inventors: Mark D. LEVY, Qizhi LIU, Jeonghyun HWANG
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Patent number: 11710655Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure, including a semiconductor-based isolation structure on a substrate. A shallow trench isolation (STI) structure may be positioned on the semiconductor-based isolation structure. An active semiconductor region is on the substrate and adjacent each of the semiconductor-based isolation structure and the STI structure. The active semiconductor region includes a doped semiconductor material. At least one device on the active semiconductor region may be horizontally distal to the STI structure.Type: GrantFiled: October 20, 2021Date of Patent: July 25, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Anthony K. Stamper, Henry L. Aldridge, Jr., Johnatan A. Kantarovsky, Jeonghyun Hwang
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Publication number: 20230207639Abstract: Disclosed are a transistor and a method for forming the transistor. The method includes concurrently forming gate and source/drain openings through an uppermost layer (i.e., a dielectric layer) in a stack of layers. The method can further include: depositing and patterning gate conductor material so that a first gate section is in the gate opening and a second gate section is above the gate opening and so that the source/drain openings are exposed; extending the depth of the source/drain openings; and depositing and patterning source/drain conductor material so that a first source/drain section is in each source/drain opening and a second source/drain section is above each source/drain opening. Alternatively, the method can include: forming a plug in the gate opening and sidewall spacers in the source/drain openings; extending the depth of source/drain openings; depositing and patterning the source/drain conductor material; and subsequently depositing and patterning the gate conductor material.Type: ApplicationFiled: February 24, 2023Publication date: June 29, 2023Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Jeonghyun Hwang, Siva P. Adusumilli, Ajay Raman
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Patent number: 11646351Abstract: Disclosed are a transistor and a method for forming the transistor. The method includes concurrently forming gate and source/drain openings through an uppermost layer (i.e., a dielectric layer) in a stack of layers. The method can further include: depositing and patterning gate conductor material so that a first gate section is in the gate opening and a second gate section is above the gate opening and so that the source/drain openings are exposed; extending the depth of the source/drain openings; and depositing and patterning source/drain conductor material so that a first source/drain section is in each source/drain opening and a second source/drain section is above each source/drain opening. Alternatively, the method can include: forming a plug in the gate opening and sidewall spacers in the source/drain openings; extending the depth of source/drain openings; depositing and patterning the source/drain conductor material; and subsequently depositing and patterning the gate conductor material.Type: GrantFiled: January 12, 2021Date of Patent: May 9, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Jeonghyun Hwang, Siva P. Adusumilli, Ajay Raman
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Publication number: 20230139011Abstract: Disclosed are embodiments of a transistor (e.g., a III-V high electron mobility transistor (HEMT), a III-V metal-insulator-semiconductor HEMT (MISHEMT), or the like) that has multiple self-aligned terminals. The self-aligned terminals include a self-aligned gate, a self-aligned source terminal and, optionally, a self-aligned drain terminal. By forming self-aligned terminals during processing, the separation distances between the terminals (e.g., between the gate and source terminal and, optionally, between the gate and drain terminal) can be reduced in order to reduce device size and to improve performance (e.g., to reduce on resistance and increase switching speeds). Also disclosed herein are method embodiments for forming such a transistor.Type: ApplicationFiled: November 3, 2021Publication date: May 4, 2023Applicant: GlobalFoundries U.S. Inc.Inventors: Zhong-Xiang He, Jeonghyun Hwang, Ramsey M. Hazbun, Brett T. Cucci, Ajay Raman, Johnatan A. Kantarovsky
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Publication number: 20230121393Abstract: Structures including devices, such as transistors, integrated on a semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a semiconductor substrate. A first transistor is formed in a first device region of a semiconductor substrate, and a second transistor is formed in a second device region of the semiconductor substrate. The second transistor includes a layer stack on the semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material. A polycrystalline layer includes a section that is positioned in the semiconductor substrate beneath the first device region.Type: ApplicationFiled: December 21, 2022Publication date: April 20, 2023Inventors: Siva P. Adusumilli, Mark Levy, Jeonghyun Hwang
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Patent number: 11616127Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.Type: GrantFiled: February 13, 2022Date of Patent: March 28, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Johnatan Avraham Kantarovsky, Rajendran Krishnasamy, Siva P. Adusumilli, Steven Bentley, Michael Joseph Zierak, Jeonghyun Hwang
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Publication number: 20230037420Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The structure includes: a gate structure comprising a horizontal portion and a substantially vertical stem portion; and an air gap surrounding the substantially vertical stem portion and having a curved surface under the horizontal portion.Type: ApplicationFiled: July 27, 2021Publication date: February 9, 2023Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Brett T. Cucci, Jeonghyun Hwang, Siva P. Adusumilli
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Publication number: 20230034728Abstract: Disclosed is an integrated circuit (IC) structure that includes a through-metal through-substrate interconnect. The interconnect extends essentially vertically through a device level metallic feature on a frontside of a substrate, extends downward from the device level metallic feature into or completely through the substrate (e.g., to contact a backside metallic feature below), and extends upward from the device level metallic feature through interlayer dielectric (ILD) material (e.g., to contact a BEOL metallic feature above). The device level metallic feature can be, for example, a metallic source/drain region of a transistor, such as a high electron mobility transistor (HEMT) or a metal-insulator-semiconductor high electron mobility transistor (MISHEMT), which is formed on the frontside of the substrate. The backside metallic feature can be a grounded metal layer. The BEOL metallic feature can be a metal wire in one of the BEOL metal levels. Also disclosed is an associated method.Type: ApplicationFiled: July 30, 2021Publication date: February 2, 2023Applicant: GLOBALFOUNDRIES U.S. Inc.Inventors: Zhong-Xiang He, Richard J. Rassel, Alvin J. Joseph, Ramsey M. Hazbun, Jeonghyun Hwang, Mark D. Levy
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Patent number: 11569374Abstract: Structures including devices, such as transistors, integrated on a semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a semiconductor substrate. A first transistor is formed in a first device region of a semiconductor substrate, and a second transistor is formed in a second device region of the semiconductor substrate. The second transistor includes a layer stack on the semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material. A polycrystalline layer includes a section that is positioned in the semiconductor substrate beneath the first device region.Type: GrantFiled: December 2, 2020Date of Patent: January 31, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Siva P. Adusumilli, Mark Levy, Jeonghyun Hwang
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Publication number: 20220392888Abstract: Structures including devices, such as transistors, integrated on a bulk semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a bulk semiconductor substrate. The bulk semiconductor substrate contains a single-crystal semiconductor material having a diamond crystal lattice structure and a <111> crystal orientation. A first transistor is formed in a first device region of the bulk semiconductor substrate, and a second transistor is formed in a second device region of the bulk semiconductor substrate. The second transistor includes a layer stack on the bulk semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material.Type: ApplicationFiled: August 18, 2022Publication date: December 8, 2022Inventors: Mark Levy, Jeonghyun Hwang, Siva P. Adusumilli
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Patent number: 11469225Abstract: Structures including devices, such as transistors, integrated on a bulk semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a bulk semiconductor substrate. The bulk semiconductor substrate contains a single-crystal semiconductor material having a diamond crystal lattice structure and a <111> crystal orientation. A first transistor is formed in a first device region of the bulk semiconductor substrate, and a second transistor is formed in a second device region of the bulk semiconductor substrate. The second transistor includes a layer stack on the bulk semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material.Type: GrantFiled: October 16, 2020Date of Patent: October 11, 2022Assignee: GlobalFoundries U.S. Inc.Inventors: Mark Levy, Jeonghyun Hwang, Siva P. Adusumilli
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Publication number: 20220223694Abstract: Disclosed are a transistor and a method for forming the transistor. The method includes concurrently forming gate and source/drain openings through an uppermost layer (i.e., a dielectric layer) in a stack of layers. The method can further include: depositing and patterning gate conductor material so that a first gate section is in the gate opening and a second gate section is above the gate opening and so that the source/drain openings are exposed; extending the depth of the source/drain openings; and depositing and patterning source/drain conductor material so that a first source/drain section is in each source/drain opening and a second source/drain section is above each source/drain opening. Alternatively, the method can include: forming a plug in the gate opening and sidewall spacers in the source/drain openings; extending the depth of source/drain openings; depositing and patterning the source/drain conductor material; and subsequently depositing and patterning the gate conductor material.Type: ApplicationFiled: January 12, 2021Publication date: July 14, 2022Applicant: GLOBALFOUNDRIES U.S. Inc.Inventors: Johnatan A. Kantarovsky, Mark D. Levy, Jeonghyun Hwang, Siva P. Adusumilli, Ajay Raman
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Publication number: 20220173233Abstract: Structures including devices, such as transistors, integrated on a semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a semiconductor substrate. A first transistor is formed in a first device region of a semiconductor substrate, and a second transistor is formed in a second device region of the semiconductor substrate. The second transistor includes a layer stack on the semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material. A polycrystalline layer includes a section that is positioned in the semiconductor substrate beneath the first device region.Type: ApplicationFiled: December 2, 2020Publication date: June 2, 2022Inventors: Siva P. Adusumilli, Mark Levy, Jeonghyun Hwang
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Publication number: 20220165853Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.Type: ApplicationFiled: February 13, 2022Publication date: May 26, 2022Inventors: JOHNATAN AVRAHAM KANTAROVSKY, RAJENDRAN KRISHNASAMY, SIVA P. ADUSUMILLI, STEVEN BENTLEY, MICHAEL JOSEPH ZIERAK, JEONGHYUN HWANG
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Patent number: 11316019Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.Type: GrantFiled: July 29, 2020Date of Patent: April 26, 2022Assignee: GlobalFoundries U.S. Inc.Inventors: Johnatan Avraham Kantarovsky, Rajendran Krishnasamy, Siva P. Adusumilli, Steven Bentley, Michael Joseph Zierak, Jeonghyun Hwang
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Publication number: 20220122963Abstract: Structures including devices, such as transistors, integrated on a bulk semiconductor substrate and methods of forming a structure including devices, such as transistors, integrated on a bulk semiconductor substrate. The bulk semiconductor substrate contains a single-crystal semiconductor material having a diamond crystal lattice structure and a <111> crystal orientation. A first transistor is formed in a first device region of the bulk semiconductor substrate, and a second transistor is formed in a second device region of the bulk semiconductor substrate. The second transistor includes a layer stack on the bulk semiconductor substrate, and the layer stack includes a layer comprised of a III-V compound semiconductor material.Type: ApplicationFiled: October 16, 2020Publication date: April 21, 2022Inventors: Mark Levy, Jeonghyun Hwang, Siva P. Adusumilli