Patents by Inventor Jeremy D. Ecton

Jeremy D. Ecton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220406618
    Abstract: Techniques for low- or zero-misaligned vias are disclosed. In one embodiment, a high-photosensitivity, medium-photosensitivity, and low-photosensitivity layer are applied to a substrate and exposed at the same time with use of a multi-tone mask. After being developed, one layer forms a mold for a first via, one layer forms a mold for a conductive trace and a second via, and one layer forms an overhang over the position for the second via. The molds formed by the photosensitive layers are filled with copper and then etched. The overhang prevents the top of the copper infill below the overhang region from being etched. As such, the region under the overhang forms a pillar or column after etching, which can be used as a via. Other embodiments are disclosed.
    Type: Application
    Filed: June 18, 2021
    Publication date: December 22, 2022
    Inventors: Changhua Liu, Leonel R. Arana, Jeremy D. Ecton, Suddhasattwa Nad, Brandon Christian Marin
  • Publication number: 20220310518
    Abstract: Embodiments disclosed herein include a multi-die packages with an embedded bridge and a thinned surface. In an example, a multi-die interconnect structure includes a package substrate having a cavity. A bridge die is in the cavity of the package substrate, the bridge die including silicon. A dielectric material is over the package substrate, over the bridge die, and in the cavity. A plurality of conductive bond pads is on the dielectric material. The multi-die interconnect structure further includes a plurality of conductive pillars, individual ones of the plurality of conductive pillars on a corresponding one of the plurality of conductive bond pads. A solder resist material is on the dielectric material, on exposed portions of the plurality of conductive bond pads, and laterally surrounding the plurality of conductive pillars. The plurality of conductive pillars has a top surface above a top surface of the solder resist material.
    Type: Application
    Filed: March 25, 2021
    Publication date: September 29, 2022
    Inventors: Haobo CHEN, Xiaoying GUO, Hongxia FENG, Kristof DARMAWIKARTA, Bai NIE, Tarek A. IBRAHIM, Gang DUAN, Jeremy D. ECTON, Sheng C. LI, Leonel ARANA
  • Publication number: 20220285278
    Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.
    Type: Application
    Filed: May 24, 2022
    Publication date: September 8, 2022
    Inventors: Jeremy D. ECTON, Hiroki TANAKA, Oscar OJEDA, Arnab ROY, Vahidreza PARICHEHREH, Leonel R. ARANA, Chung Kwang TAN, Robert A. MAY
  • Patent number: 11373951
    Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: June 28, 2022
    Assignee: Intel Corporation
    Inventors: Jeremy D. Ecton, Hiroki Tanaka, Oscar Ojeda, Arnab Roy, Vahidreza Parichehreh, Leonel R. Arana, Chung Kwang Tan, Robert A. May
  • Publication number: 20220196914
    Abstract: Embodiments disclosed herein include electronic packages and methods of forming such structures. In an embodiment, an electronic package comprises a package substrate, a first die over the package substrate, and a second die over the package substrate. In an embodiment, the electronic package further comprises an optical waveguide on the package substrate. In an embodiment, a first end of the optical waveguide is below the first die and a second end of the optical waveguide is below the second die. In an embodiment, the optical waveguide communicatively couples the first die to the second die.
    Type: Application
    Filed: December 22, 2020
    Publication date: June 23, 2022
    Inventors: Jeremy D. ECTON, Hiroki TANAKA, Brandon C. MARIN, Srinivas V. PIETAMBARAM, Gang DUAN, Bai NIE, Haobo CHEN, Zhichao ZHANG, Sai VADLAMANI, Aleksandar ALEKSOV
  • Publication number: 20220093520
    Abstract: Conductive routes for an electronic substrate may be fabricated by forming an opening in a material, using existing laser drilling or lithography tools and materials, followed by selectively plating a metal on the sidewalls of the opening. The processes of the present description may result in significantly higher patterning resolution or feature scaling (up to 2× improvement in patterning density/resolution). In addition to improved patterning resolution, the embodiments of the present description may also result in higher aspect ratios of the conductive routes, which can result in improved signaling, reduced latency, and improved yield.
    Type: Application
    Filed: September 21, 2020
    Publication date: March 24, 2022
    Applicant: Intel Corporation
    Inventors: Jeremy D. Ecton, Aleksandar Aleksov, Brandon C. Marin, Yonggang Li, Leonel Arana, Suddhasattwa Nad, Haobo Chen, Tarek Ibrahim
  • Publication number: 20210305668
    Abstract: A method of fabricating an RF filter on a semiconductor package comprises forming a first dielectric buildup film. A second dielectric buildup film is formed over the first dielectric buildup film, the second dielectric buildup film comprising a dielectric material that contains a metallization catalyst, wherein the dielectric material comprises one of an epoxy-polymer blend dielectric material, silicon dioxide and silicon nitride, and a low-k dielectric. A trench is formed in the second dielectric buildup film with laser ablation, wherein the laser ablation selectively activates sidewalls of the trench for electroless metal deposition. A metal selectively is plated to sidewalls of the trench based at least in part on the metallization catalyst and immersion in an electroless solution. A low-loss buildup film is formed over the metal that substantially fills the trench.
    Type: Application
    Filed: June 10, 2021
    Publication date: September 30, 2021
    Inventors: Brandon C. MARIN, Jeremy D. ECTON, Aleksandar ALEKSOV, Kristof DARMAWIKARTA, Yonggang LI, Dilan SENEVIRATNE
  • Patent number: 11081768
    Abstract: A filter structure comprises a first dielectric buildup film. A second dielectric buildup film is over the first dielectric buildup film, the second dielectric buildup film including a metallization catalyst. A trench is in the second dielectric buildup film. A metal is selectively plated to sidewalls of the trench based at least in part on the metallization catalyst. A low-loss buildup film is over the metal that substantially fills the trench.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: August 3, 2021
    Assignee: Intel Corporation
    Inventors: Brandon C. Marin, Jeremy D. Ecton, Aleksandar Aleksov, Kristof Darmawikarta, Yonggang Li, Dilan Seneviratne
  • Publication number: 20210151393
    Abstract: A substrate for an electronic device may include a first layer, a second layer, and may include a third layer. The first layer may include a capacitive material, and the capacitive material may be segmented into a first section, and a second section. Each of the first section and the second section may include a first surface and a second surface. The second layer may include a first conductor. The third layer may include a second conductor. The first surface of the second section of capacitive material may be directly coupled to the first conductor. The second surface of the second section of the capacitive material may be directly coupled to the second conductor. A first filler region may include a dielectric material and the first filler region may be located in a first gap between the first section of capacitive material and the second section of capacitive material.
    Type: Application
    Filed: January 26, 2021
    Publication date: May 20, 2021
    Inventors: Brandon C Marin, Shivasubramanian Balasubramanian, Rahul Jain, Praneeth Akkinepally, Jeremy D Ecton
  • Patent number: 10923443
    Abstract: A substrate for an electronic device may include a first layer, a second layer, and may include a third layer. The first layer may include a capacitive material, and the capacitive material may be segmented into a first section, and a second section. Each of the first section and the second section may include a first surface and a second surface. The second layer may include a first conductor. The third layer may include a second conductor. The first surface of the second section of capacitive material may be directly coupled to the first conductor. The second surface of the second section of the capacitive material may be directly coupled to the second conductor. A first filler region may include a dielectric material and the first filler region may be located in a first gap between the first section of capacitive material and the second section of capacitive material.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: February 16, 2021
    Assignee: Intel Corporation
    Inventors: Brandon C Marin, Shivasubramanian Balasubramanian, Rahul Jain, Praneeth Akkinepally, Jeremy D Ecton
  • Patent number: 10910327
    Abstract: A package for an electronic device may include a first layer. The first layer may include a first dielectric material. The first layer may have a planar first surface. The first layer may have a variable thickness. A second layer may be coupled to the first layer. The second layer may include a second dielectric material and may have a planar second surface. The second layer may have a variable thickness. A seam may be located at an interface between the first layer and the second layer, and the seam may have an undulating profile. The package may include at least one electrical trace, for example located in the first layer or the second layer.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: February 2, 2021
    Assignee: Intel Corporation
    Inventors: Yonggang Li, Brandon C Marin, Vahidreza Parichehreh, Jeremy D Ecton
  • Publication number: 20200411413
    Abstract: A substrate for an electronic device may include a first layer, and the first layer may include dielectric material. The first layer may include a first interconnect, and the first interconnect may have a first interconnect profile. The substrate may include a second layer, and the second layer may include dielectric material. The second layer may include a second interconnect, and the second interconnect may have a second interconnect profile. The first interconnect profile may be indicative of a subtractive manufacturing operation and the second interconnect profile may be indicative of an additive manufacturing operation.
    Type: Application
    Filed: June 27, 2019
    Publication date: December 31, 2020
    Inventors: Amruthavalli Pallavi Alur, Brandon C. Marin, Yikang Deng, Liwei Cheng, Jeremy D. Ecton, Andrew J. Brown, Lauren A. Link, Cheng Xu, Prithwish Chatterjee, Ying Wang
  • Publication number: 20200395317
    Abstract: Embodiments include semiconductor packages and method of forming the semiconductor packages. A semiconductor package includes first waveguides over a package substrate. The first waveguides include first angled conductive layers, first transmission lines, and first cavities. The semiconductor package also includes a first dielectric over the first waveguides and package substrate, second waveguides over the first dielectric and first waveguides, and a second dielectric over the second waveguides and first dielectric. The second waveguides include second angled conductive layers, second transmission lines, and second cavities. The first angled conductive layers are positioned over the first transmission lines and package substrate having a first pattern of first triangular structures.
    Type: Application
    Filed: June 11, 2019
    Publication date: December 17, 2020
    Inventors: Brandon C. MARIN, Aleksandar ALEKSOV, Georgios DOGIAMIS, Jeremy D. ECTON, Suddhasattwa NAD, Mohammad Mamunur RAHMAN
  • Publication number: 20200373157
    Abstract: A thin-film insulator comprises a first electrode over a substrate. A photo up-converting material is over the first electrode. A cured photo-imageable dielectric (PID) containing a high-k filler material is over the photo up-converting material, wherein the cured PID is less than 4 ?m in thickness, and a second electrode is over the cured PID.
    Type: Application
    Filed: May 22, 2019
    Publication date: November 26, 2020
    Inventors: Jeremy D. ECTON, Brandon C. MARIN, Andrew J. BROWN, Dilan SENEVIRATNE
  • Publication number: 20200373261
    Abstract: A filter structure comprises a first dielectric buildup film. A second dielectric buildup film is over the first dielectric buildup film, the second dielectric buildup film including a metallization catalyst. A trench is in the second dielectric buildup film. A metal is selectively plated to sidewalls of the trench based at least in part on the metallization catalyst. A low-loss buildup film is over the metal that substantially fills the trench.
    Type: Application
    Filed: May 24, 2019
    Publication date: November 26, 2020
    Inventors: Brandon C. MARIN, Jeremy D. ECTON, Aleksandar ALEKSOV, Kristof DARMAWIKARTA, Yonggang LI, Dilan SENEVIRATNE
  • Publication number: 20200312793
    Abstract: A substrate for an electronic device may include a first layer, a second layer, and may include a third layer. The first layer may include a capacitive material, and the capacitive material may be segmented into a first section, and a second section. Each of the first section and the second section may include a first surface and a second surface. The second layer may include a first conductor. The third layer may include a second conductor. The first surface of the second section of capacitive material may be directly coupled to the first conductor. The second surface of the second section of the capacitive material may be directly coupled to the second conductor. A first filler region may include a dielectric material and the first filler region may be located in a first gap between the first section of capacitive material and the second section of capacitive material.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Brandon C. Marin, Shivasubramanian Balasubramanian, Rahul Jain, Praneeth Akkinepally, Jeremy D. Ecton
  • Publication number: 20200312787
    Abstract: A package for an electronic device may include a first layer. The first layer may include a first dielectric material. The first layer may have a planar first surface. The first layer may have a variable thickness. A second layer may be coupled to the first layer. The second layer may include a second dielectric material and may have a planar second surface. The second layer may have a variable thickness. A seam may be located at an interface between the first layer and the second layer, and the seam may have an undulating profile. The package may include at least one electrical trace, for example located in the first layer or the second layer.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Yonggang Li, Brandon C. Marin, Vahidreza Parichehreh, Jeremy D. Ecton
  • Patent number: 10438812
    Abstract: The systems and methods described herein use at least one etchant and at least one photochemically active material in conjunction with electromagnetic energy applied simultaneous with the etchant and photochemically active material during the etching process. The interaction between the electromagnetic energy and the photochemically active material preferentially increases the etch rate in a direction along the axis of incidence of the electromagnetic energy, thereby permitting the anisotropic formation of voids within the semiconductor substrate. These anisotropic voids may be more closely spaced (i.e., arranged on a tighter pitch) than the isotropic voids produced using conventional etching technologies. By placing the voids in the semiconductor substrate on a tighter pitch, greater component density may be achieved.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: October 8, 2019
    Assignee: Intel Corporation
    Inventors: Jeremy D. Ecton, Changhua Liu, Arnab Roy, Oscar U. Ojeda, Timothy A. White, Nicholas S. Haehn
  • Publication number: 20190304912
    Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.
    Type: Application
    Filed: March 27, 2018
    Publication date: October 3, 2019
    Applicant: INTEL CORPORATION
    Inventors: Jeremy D. Ecton, Hiroki Tanaka, Oscar Ojeda, Arnab Roy, Vahidreza Parichehreh, Leonel R. Arana, Chung Kwang Tan, Robert A. May
  • Publication number: 20180286700
    Abstract: The systems and methods described herein use at least one etchant and at least one photochemically active material in conjunction with electromagnetic energy applied simultaneous with the etchant and photochemically active material during the etching process. The interaction between the electromagnetic energy and the photochemically active material preferentially increases the etch rate in a direction along the axis of incidence of the electromagnetic energy, thereby permitting the anisotropic formation of voids within the semiconductor substrate. These anisotropic voids may be more closely spaced (i.e., arranged on a tighter pitch) than the isotropic voids produced using conventional etching technologies. By placing the voids in the semiconductor substrate on a tighter pitch, greater component density may be achieved.
    Type: Application
    Filed: March 30, 2017
    Publication date: October 4, 2018
    Applicant: INTEL CORPORATION
    Inventors: Jeremy D. Ecton, Changhua Liu, Arnab Roy, Oscar U. Ojeda, Timothy A. White, Nicholas S. Haehn