Patents by Inventor Jerome Machillot

Jerome Machillot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low thermal budget crystallization of amorphous metal silicides
    Patent number: 10354882
    Abstract: Methods for forming a metal silicide film with low resistivity at low temperature are described. A metal silicide film is formed on a substrate surface and annealed at high pressure and low temperature.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: July 16, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Bencherki Mebarki, Xianmin Tang, Sundar Ramamurthy, Jerome Machillot
  • Low Thermal Budget Crystallization Of Amorphous Metal Silicides
    Publication number: 20180315609
    Abstract: Methods for forming a metal silicide film with low resistivity at low temperature are described. A metal silicide film is formed on a substrate surface and annealed at high pressure and low temperature.
    Type: Application
    Filed: April 26, 2018
    Publication date: November 1, 2018
    Inventors: Bencherki Mebarki, Xianmin Tang, Sundar Ramamurthy, Jerome Machillot